Structural and dielectric characterization of the (Ba1−xSrx)(Ti0.9Sn0.1)O3 thin films deposited on Pt/Ti/SiO2/Si substrate by radio frequency magnetron sputtering

Moo-Chin Wang; Cheng-Chi Tsai; Nan-Chung Wu; Kun-Ming Hung

doi:10.1063/1.1492002

Structural and dielectric characterization of the (Ba1−xSrx)(Ti0.9Sn0.1)O3 thin films deposited on Pt/Ti/SiO2/Si substrate by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.1492002 ◽

2002 ◽

Vol 92 (4) ◽

pp. 2100-2107 ◽

Cited By ~ 14

Author(s):

Moo-Chin Wang ◽

Cheng-Chi Tsai ◽

Nan-Chung Wu ◽

Kun-Ming Hung

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Si Substrate ◽

Dielectric Characterization

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Preparation and Characterization of 70TeO2-30WO3 Glass Thin Films by Radio-Frequency Magnetron Sputtering Method

Solid State Phenomena - Advances in Nanomaterials and Processing ◽

10.4028/3-908451-31-0.487 ◽

2007 ◽

pp. 487-490

Author(s):

Jin Hyeok Kim ◽

Ki Young Yoo ◽

Sang Hoon Shin ◽

Sun Hyun Youn ◽

Jong Ha Moon

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Characterization of (Ba,Sr)TiO[sub 3] Thin Films on BaPbO[sub 3] Electrode Prepared by Radio Frequency Magnetron Sputtering

Journal of The Electrochemical Society ◽

10.1149/1.2120307 ◽

2005 ◽

Vol 152 (12) ◽

pp. F213 ◽

Cited By ~ 5

Author(s):

Chun-Sheng Liang ◽

Jenn-Ming Wu

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Characterization of (Pb1-xLax)TiO3 thin films grown by radio-frequency magnetron sputtering and their electrical properties

Integrated Ferroelectrics ◽

10.1080/10584589508012264 ◽

1995 ◽

Vol 10 (1-4) ◽

pp. 63-72 ◽

Cited By ~ 11

Author(s):

Su-Jin Chae ◽

Sang-Shik Park ◽

Soon-Gil Yoon ◽

Won-Jae Lee ◽

Ho-Gi Kim

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Preparation and characterization of SrTiO3/BaTiO3 thin multilayer films deposited on Pt/Ti/SiO2/Si substrate by radio frequency magnetron sputtering

Journal of Non-Crystalline Solids ◽

10.1016/j.jnoncrysol.2005.10.014 ◽

2005 ◽

Vol 351 (52-54) ◽

pp. 3809-3815 ◽

Cited By ~ 8

Author(s):

Hong-Hsin Huang ◽

Fu-Yuan Hsiao ◽

Nan-Chang Wu ◽

Moo-Chin Wang

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Multilayer Films ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Si Substrate

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Characterization of Ferroelectric SrBi2Ta2 O 9 Thin Films Deposited by a Radio Frequency Magnetron Sputtering Technique

Journal of The Electrochemical Society ◽

10.1149/1.1837907 ◽

1997 ◽

Vol 144 (8) ◽

pp. 2855-2858 ◽

Cited By ~ 28

Author(s):

Sang‐Shik Park ◽

Cheol‐Hoon Yang ◽

Soon‐Gil Yoon ◽

Jun‐Hyung Ahn ◽

Ho‐Gi Kim

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Characterization of amorphous p-type transparent CuFeO2 thin films prepared by radio frequency magnetron sputtering method at room temperature

Thin Solid Films ◽

10.1016/j.tsf.2015.04.066 ◽

2015 ◽

Vol 589 ◽

pp. 17-21 ◽

Cited By ~ 12

Author(s):

Zanhong Deng ◽

Xiaodong Fang ◽

Xi Wang ◽

Suzhen Wu ◽

Weiwei Dong ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Room Temperature ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

P Type

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Characterization of CuInS2 Thin Films Deposited by Radio-Frequency Magnetron Sputtering from Nanoparticles Synthesized by Solvothermal Route

Sensor Letters ◽

10.1166/sl.2011.1791 ◽

2011 ◽

Vol 9 (6) ◽

pp. 2186-2189 ◽

Cited By ~ 3

Author(s):

F. Ghribi ◽

L. El Mir ◽

H. Dahman ◽

Z. Ben Ayadi ◽

K. Djessas ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Solvothermal Route ◽

Cuins2 Thin Films

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Preparation and characterization of nanostructured silver thin films deposited by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/s0040-6090(00)01253-0 ◽

2000 ◽

Vol 375 (1-2) ◽

pp. 300-303 ◽

Cited By ~ 28

Author(s):

Yuqing Xiong ◽

Hao Wu ◽

Yan Guo ◽

Yan Sun ◽

Dequan Yang ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Silver Thin Films

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Characterization of crystalline Pb0.92La0.08Zr0.4Ti0.6O3 thin films grown by off-axis radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2005.06.099 ◽

2005 ◽

Vol 492 (1-2) ◽

pp. 71-74 ◽

Cited By ~ 6

Author(s):

A.K. Sarin Kumar ◽

Ø. Dahl ◽

S.V. Pettersen ◽

J.K. Grepstad ◽

T. Tybell

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Radio frequency magnetron sputtering growth and characterization of indium-tin oxide (ITO) thin films for NO2 gas sensors

Sensors and Actuators ◽

10.1016/0250-6874(88)87013-6 ◽

1988 ◽

Vol 15 (3) ◽

pp. 235-242 ◽

Cited By ~ 56

Author(s):

G. Sberveglieri ◽

S. Groppelli ◽

G. Coccoli

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Gas Sensors ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Ito Thin Films

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