Bulk carrier lifetime measurement by the microwave reflectance photoconductivity decay method with external surface electric field

2002 ◽  
Vol 80 (23) ◽  
pp. 4390-4392 ◽  
Author(s):  
Masaya Ichimura ◽  
Atsushi Tada ◽  
Eisuke Arai ◽  
Hiroyuki Takamatsu ◽  
Shingo Sumie
2007 ◽  
Vol 46 (1) ◽  
pp. 35-39 ◽  
Author(s):  
Hideki Watanabe ◽  
Masashi Kato ◽  
Masaya Ichimura ◽  
Eisuke Arai ◽  
Masakazu Kanechika ◽  
...  

2006 ◽  
Vol 21 (6) ◽  
pp. 771-774 ◽  
Author(s):  
Yanqiu Lv ◽  
Nili Wang ◽  
Chunquan Zhuang ◽  
Ping Li ◽  
Bing Han ◽  
...  

1997 ◽  
Vol 473 ◽  
Author(s):  
Heng-Chih Lin ◽  
Edwin C. Kan ◽  
Toshiaki Yamanaka ◽  
Simon J. Fang ◽  
Kwame N. Eason ◽  
...  

ABSTRACTFor future CMOS GSI technology, Si/SiO2 interface micro-roughness becomes a non-negligible problem. Interface roughness causes fluctuations of the surface normal electric field, which, in turn, change the gate oxide Fowler-Nordheim tunneling behavior. In this research, we used a simple two-spheres model and a three-dimensional Laplace solver to simulate the electric field and the tunneling current in the oxide region. Our results show that both quantities are strong functions of roughness spatial wavelength, associated amplitude, and oxide thickness. We found that RMS roughness itself cannot fully characterize surface roughness and that roughness has a larger effect for thicker oxide in terms of surface electric field and tunneling behavior.


1984 ◽  
Vol 53 (5) ◽  
pp. 493-496 ◽  
Author(s):  
A. D. Wieck ◽  
E. Batke ◽  
D. Heitmann ◽  
J. P. Kotthaus ◽  
E. Bangert

2000 ◽  
Vol 73 (1-3) ◽  
pp. 230-234 ◽  
Author(s):  
M Ichimura ◽  
M Hirano ◽  
A Tada ◽  
E Arai ◽  
H Takamatsu ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document