Ion beam etching of lead–zirconate–titanate thin films: Correlation between etching parameters and electrical properties evolution

2002 ◽  
Vol 92 (2) ◽  
pp. 1048-1055 ◽  
Author(s):  
C. Soyer ◽  
E. Cattan ◽  
D. Rèmiens ◽  
M. Guilloux-Viry
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Lead Zirconate Titanate ◽  
Ion Beam ◽  
Lead Zirconate ◽  
Ion Beam Etching ◽  
Zirconate Titanate ◽  
Etching Parameters

Structural and electrical properties of seeded lead zirconate titanate thin films

2000 ◽  
Vol 375 (1-2) ◽  
pp. 24-28 ◽  
Author(s):  
Aiying Wu ◽  
Li Yang ◽  
P.M Vilarinho ◽  
I.M Miranda Salvado ◽  
J.L Baptista
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Structural And Electrical Properties
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