Plasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current
1998 ◽
Vol 26
(3)
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pp. 1017-1021
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2019 ◽
Vol 47
(7)
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pp. 3044-3046
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2011 ◽
Vol 20
(1)
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pp. 015011
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2019 ◽
Vol 52
(35)
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pp. 355202
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