Tetrahedral amorphous-carbon thin films for silicon-on-insulator application

Z. R. Song; Y. H. Yu; C. L. Li; S. C. Zou; F. M. Zhang; X. Wang; D. S. Shen; E. Z. Luo; B. Sundaravel; S. P. Wong; I. H. Wilson

doi:10.1063/1.1445472

Tetrahedral amorphous-carbon thin films for silicon-on-insulator application

Applied Physics Letters ◽

10.1063/1.1445472 ◽

2002 ◽

Vol 80 (5) ◽

pp. 743-745 ◽

Cited By ~ 8

Author(s):

Z. R. Song ◽

Y. H. Yu ◽

C. L. Li ◽

S. C. Zou ◽

F. M. Zhang ◽

...

Keyword(s):

Thin Films ◽

Amorphous Carbon ◽

Silicon On Insulator ◽

Tetrahedral Amorphous Carbon ◽

Carbon Thin Films

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Influence of surface passivation on the friction and wear behavior of ultrananocrystalline diamond and tetrahedral amorphous carbon thin films

Physical Review B ◽

10.1103/physrevb.85.155448 ◽

2012 ◽

Vol 85 (15) ◽

Cited By ~ 132

Author(s):

A. R. Konicek ◽

D. S. Grierson ◽

A. V. Sumant ◽

T. A. Friedmann ◽

J. P. Sullivan ◽

...

Keyword(s):

Thin Films ◽

Amorphous Carbon ◽

Friction And Wear ◽

Surface Passivation ◽

Wear Behavior ◽

Friction And Wear Behavior ◽

Tetrahedral Amorphous Carbon ◽

Ultrananocrystalline Diamond ◽

Carbon Thin Films

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Investigation of local ordering and electronic structure in Si- and hydrogen-doped tetrahedral amorphous carbon thin films

Applied Physics Letters ◽

10.1063/1.2149173 ◽

2005 ◽

Vol 87 (25) ◽

pp. 251918 ◽

Cited By ~ 3

Author(s):

G. A. Abbas ◽

P. Papakonstantinou ◽

J. A. McLaughlin

Keyword(s):

Thin Films ◽

Electronic Structure ◽

Amorphous Carbon ◽

Tetrahedral Amorphous Carbon ◽

Local Ordering ◽

Carbon Thin Films

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Studying the high-field electron conduction of tetrahedral amorphous carbon thin films by conducting atomic force microscopy

Materials Characterization ◽

10.1016/s1044-5803(02)00240-1 ◽

2002 ◽

Vol 48 (2-3) ◽

pp. 205-210 ◽

Cited By ~ 9

Author(s):

E.Z Luo ◽

S Lin ◽

Z Xie ◽

J.B Xu ◽

I.H Wilson ◽

...

Keyword(s):

Thin Films ◽

Atomic Force Microscopy ◽

Amorphous Carbon ◽

High Field ◽

Electron Conduction ◽

Force Microscopy ◽

Tetrahedral Amorphous Carbon ◽

Atomic Force ◽

Field Electron ◽

Carbon Thin Films

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Synthesis and structure of nitrogenated tetrahedral amorphous carbon thin films prepared by a pulsed filtered vacuum arc deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(02)00246-7 ◽

2003 ◽

Vol 12 (1) ◽

pp. 1-7 ◽

Cited By ~ 23

Author(s):

X.W. Zhang ◽

N. Ke ◽

W.Y. Cheung ◽

S.P. Wong

Keyword(s):

Thin Films ◽

Amorphous Carbon ◽

Vacuum Arc ◽

Tetrahedral Amorphous Carbon ◽

Vacuum Arc Deposition ◽

Carbon Thin Films ◽

Arc Deposition

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Ion Beam Induced Darkening in Tetrahedral Amorphous Carbon Thin Films

Acta Physica Polonica A ◽

10.12693/aphyspola.128.953 ◽

2015 ◽

Vol 128 (5) ◽

pp. 953-956 ◽

Cited By ~ 2

Author(s):

M. Sandulov ◽

M. Berova ◽

T. Tsvetkova ◽

J. Zuk

Keyword(s):

Thin Films ◽

Amorphous Carbon ◽

Ion Beam ◽

Tetrahedral Amorphous Carbon ◽

Carbon Thin Films

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Nonvolatile memory effects in nitrogen doped tetrahedral amorphous carbon thin films

Journal of Applied Physics ◽

10.1063/1.368824 ◽

1998 ◽

Vol 84 (10) ◽

pp. 5647-5651 ◽

Cited By ~ 34

Author(s):

E. G. Gerstner ◽

D. R. McKenzie

Keyword(s):

Thin Films ◽

Amorphous Carbon ◽

Nonvolatile Memory ◽

Memory Effects ◽

Nitrogen Doped ◽

Tetrahedral Amorphous Carbon ◽

Carbon Thin Films

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Comparing hardness and wear data for tetrahedral amorphous carbon and hydrogenated amorphous carbon thin films

Wear ◽

10.1016/j.wear.2004.01.010 ◽

2004 ◽

Vol 257 (5-6) ◽

pp. 509-522 ◽

Cited By ~ 43

Author(s):

P Lemoine ◽

J.P Quinn ◽

P Maguire ◽

J.A McLaughlin

Keyword(s):

Thin Films ◽

Amorphous Carbon ◽

Hydrogenated Amorphous Carbon ◽

Tetrahedral Amorphous Carbon ◽

Carbon Thin Films ◽

Hydrogenated Amorphous

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Low temperature annealing in tetrahedral amorphous carbon thin films observed by13CNMR spectroscopy

Physical Review B ◽

10.1103/physrevb.67.245309 ◽

2003 ◽

Vol 67 (24) ◽

Cited By ~ 40

Author(s):

Todd M. Alam ◽

T. A. Friedmann ◽

Peter A. Schultz ◽

Daniel Sebastiani

Keyword(s):

Thin Films ◽

Low Temperature ◽

Amorphous Carbon ◽

Tetrahedral Amorphous Carbon ◽

Low Temperature Annealing ◽

Carbon Thin Films

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The structure of tetrahedral amorphous carbon thin films

Thin Solid Films ◽

10.1016/s0040-6090(96)09182-1 ◽

1996 ◽

Vol 290-291 ◽

pp. 317-322 ◽

Cited By ~ 45

Author(s):

S.R.P. Silva ◽

Shi Xu ◽

B.K. Tay ◽

H.S. Tan ◽

H.-J. Scheibe ◽

...

Keyword(s):

Thin Films ◽

Amorphous Carbon ◽

Tetrahedral Amorphous Carbon ◽

Carbon Thin Films

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Modification of graphene-like, hydrogenated amorphous, hydrogenated tetrahedral amorphous carbon and amorphous carbon thin films by UV-C light

Surfaces and Interfaces ◽

10.1016/j.surfin.2021.101073 ◽

2021 ◽

Vol 24 ◽

pp. 101073

Author(s):

T.I. Milenov ◽

I.A. Avramova ◽

A. Dikovska ◽

D. Karaivanova ◽

P. Terziyska ◽

...

Keyword(s):

Thin Films ◽

Amorphous Carbon ◽

Tetrahedral Amorphous Carbon ◽

Carbon Thin Films ◽

Hydrogenated Amorphous ◽

Uv C

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