Sol–gel preparation of single-layer, 0.75 μm thick lead zirconate titanate films from lead nitrate-titanium and zirconium alkoxide solutions containing polyvinylpyrrolidone

2001 ◽  
Vol 79 (21) ◽  
pp. 3485-3487 ◽  
Author(s):  
Shinsuke Takenaka ◽  
Hiromitsu Kozuka
Keyword(s):  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Nitrate ◽  
Single Layer ◽  
Lead Zirconate ◽  
Zirconium Alkoxide ◽  
Zirconate Titanate ◽  
Gel Preparation ◽  
Thick Lead

Sol-Gel Preparation of Lead Zirconate Titanate Powders and Ceramics: Effect of Alkoxide Stabilizers and Lead Precursors

2000 ◽  
Vol 83 (6) ◽  
pp. 1379-1385 ◽  
Author(s):  
Aiying Wu ◽  
Paula M. Vilarinho ◽  
Isabel M. Miranda Salvado ◽  
João L. Baptista
Keyword(s):  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Gel Preparation

ChemInform Abstract: Sol-Gel Preparation of Lead Zirconate Titanate Powders and Ceramics: Effect of Alkoxide Stabilizers and Lead Precursors.

ChemInform ◽  
2000 ◽  
Vol 31 (40) ◽  
pp. no-no
Author(s):  
Aiying Wu ◽  
Paula M. Vilarinho ◽  
Isabel M. Miranda Salvado ◽  
Joao L. Baptista
Keyword(s):  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Gel Preparation

Characterization of thick lead zirconate titanate films fabricated using a new sol gel based process

1997 ◽  
Vol 81 (2) ◽  
pp. 876-881 ◽  
Author(s):  
D. A. Barrow ◽  
T. E. Petroff ◽  
R. P. Tandon ◽  
M. Sayer
Keyword(s):  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Thick Lead

Early Stages of Crystallization of Sol−Gel-Derived Lead Zirconate Titanate Thin Films

2003 ◽  
Vol 15 (5) ◽  
pp. 1147-1155 ◽  
Author(s):  
A. Wu ◽  
P. M. Vilarinho ◽  
I. Reaney ◽  
I. M. Miranda Salvado
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Early Stages ◽  
Zirconate Titanate

scholarly journals Interfacial mechanisms controlling phase formation in sol-gel derived lead zirconate titanate thin films

1994 ◽  
Vol 17 (6) ◽  
pp. 1005-1014 ◽  
Author(s):  
S B Majumder ◽  
V N Kulkarni ◽  
Y N Mohapatra ◽  
D C Agrawal
Keyword(s):  
Thin Films ◽  
Phase Formation ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Zirconate Titanate

Mist Deposition of Micron-Thick Lead Zirconate Titanate Films

2003 ◽  
Vol 784 ◽  
Author(s):  
Mark D. Losego ◽  
Susan Trolier-McKinstry
Keyword(s):  
Lead Zirconate Titanate ◽  
Chemical Deposition ◽  
Lead Zirconate ◽  
Limiting Factors ◽  
Process Time ◽  
Silicon Substrates ◽  
Zirconate Titanate ◽  
Pzt Films ◽  
Chamber Temperature ◽  
Thick Lead

ABSTRACTA majority of the work published on liquid source misted chemical deposition (LSMCD) has focused on the fabrication of thin ferroelectric films for random access memory (RAM) applications. However, the ability of LSMCD to combine the characteristically good stoichiometry control of a chemical solution deposition process with good film conformality, makes this a desirable technique for other applications, including microactuators and integrated passive components. For these applications, though, LSMCD is limited by its low throughput. This paper describes the feasibility of depositing micron-thick lead zirconate titanate (PZT) films using the LSMCD tool. PZT films of 52/48 composition were deposited on both platinized silicon and platinized alumina substrates. The chamber temperature and the delivery geometry of the LSMCD tool were identified as limiting factors in the rate at which micron-thick samples can be prepared. By switching to a focused nozzle delivery geometry and increasing the chamber temperature from room temperature to 60°C, the total process time for 1 μm thick films can be reduced from 480 min to 90 min. Polarization hysteresis measurements indicated a 75% higher remanent polarization for PZT films deposited on platinized alumina substrates (35 μC/cm2) compared to those deposed on platinized silicon substrates (20 μC/cm2). The polarization loop for the silicon substrate sample was also tilted. These observations are evidence of higher tensile stresses in the PZT films deposited on silicon substrates due to a larger mismatch in the thermal expansion coefficients of the film and the substrate.

Sol-Gel Bonded Piezoelectric Lead Zirconate Titanate Ceramics

2006 ◽  
pp. 2477-2482
Author(s):  
Chontira Sangsubun ◽  
Anucha Watcharapasorn ◽  
Manoch Naksata ◽  
Tawee Tunkasiri ◽  
Sukanda Jiansirisomboon
Keyword(s):  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Piezoelectric Lead Zirconate Titanate ◽  
Titanate Ceramics
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