Selective-area atomic layer epitaxy growth of ZnO features on soft lithography-patterned substrates

2001 ◽  
Vol 79 (11) ◽  
pp. 1709-1711 ◽  
Author(s):  
M. Yan ◽  
Y. Koide ◽  
J. R. Babcock ◽  
P. R. Markworth ◽  
J. A. Belot ◽  
...  
Keyword(s):  
Soft Lithography ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Patterned Substrates ◽  
Selective Area

Selective Area Growth by Metal Organic Vapor Phase Epitaxy and Atomic Layer Epitaxy Using Ga2O3as a Novel Mask Layer

1999 ◽  
Vol 38 (Part 1, No. 3A) ◽  
pp. 1516-1520 ◽  
Author(s):  
Shingo Hirose ◽  
Akihiro Yoshida ◽  
Masaaki Yamaura ◽  
Kazuhiko Hara ◽  
Hiro Munekata
Keyword(s):  
Vapor Phase ◽  
Atomic Layer ◽  
Vapor Phase Epitaxy ◽  
Atomic Layer Epitaxy ◽  
Selective Area Growth ◽  
Organic Vapor ◽  
Mask Layer ◽  
Selective Area ◽  
Area Growth ◽  
Metal Organic

Atomic Layer Epitaxy

1990 ◽  
Vol 198 ◽  
Author(s):  
Akira Usui
Keyword(s):  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Selective Area Growth ◽  
Selective Area ◽  
Cycle Growth ◽  
High Uniformity ◽  
Recent Developments ◽  
Potential Applications ◽  
Fine Structures ◽  
Order Structures

ABSTRACTAtomic layer epitaxy(ALE) of III-V compound semiconductors is reviewed. This technology has grown in recent years because of potential applications to nanometer-order structures as well as to monolayer/cycle growth with high-uniformity in growth thickness, and to excellent selective-area growth. Recent developments in chloride ALE of various compounds and heterostructures are described. Potentials of ALE for producing such fine structures are shown.

Selective area epitaxy of GaAs on Si using atomic layer epitaxy by LP-MOVPE

1991 ◽  
Vol 107 (1-4) ◽  
pp. 129-135 ◽  
Author(s):  
N.H. Karam ◽  
V. Haven ◽  
S.M. Vernon ◽  
N. El-Masry ◽  
E.H. Lingunis ◽  
...  
Keyword(s):  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Selective Area Epitaxy ◽  
Gaas On Si ◽  
Selective Area

Growth and evaluation of GaAsN films with different N distribution grown by atomic layer epitaxy method

2020 ◽  
Vol 59 (SG) ◽  
pp. SGGF10
Author(s):  
Masahiro Kawano ◽  
Ryo Minematsu ◽  
Tomohiro Haraguchi ◽  
Atsuhiko Fukuyama ◽  
Hidetoshi Suzuki
Keyword(s):  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
N Distribution

Optical properties of Zn(S,Se) sawtooth superlattices grown by atomic layer epitaxy

1996 ◽  
Vol 80 (4) ◽  
pp. 2363-2366 ◽  
Author(s):  
Hiroyuki Fujiwara ◽  
Toshiyuki Nabeta ◽  
Isamu Shimizu ◽  
Takashi Yasuda
Keyword(s):  
Optical Properties ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy

Steric hindrance effects in atomic layer epitaxy of InAs

1989 ◽  
Vol 55 (3) ◽  
pp. 244-246 ◽  
Author(s):  
Weon G. Jeong ◽  
E. P. Menu ◽  
P. D. Dapkus
Keyword(s):  
Steric Hindrance ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy
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