Ion beam characterization of advanced metallization for ULSI applications

2001 ◽  
Author(s):  
A. E. Bair
2019 ◽  
Vol 4 (2) ◽  
pp. 489-493 ◽  
Author(s):  
Jungwoo Z. Lee ◽  
Thomas A. Wynn ◽  
Marshall A. Schroeder ◽  
Judith Alvarado ◽  
Xuefeng Wang ◽  
...  

2009 ◽  
pp. 355-355-7
Author(s):  
JG Beery ◽  
MG Hollander ◽  
CJ Maggiore ◽  
A Redondo ◽  
RT Westervelt ◽  
...  

2009 ◽  
Vol 15 (S2) ◽  
pp. 370-371
Author(s):  
K Wong ◽  
N Anantharamaiah ◽  
R Garcia ◽  
D Batchelor ◽  
B Pourdeyhimi ◽  
...  

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009


Scanning ◽  
2005 ◽  
Vol 27 (6) ◽  
pp. 275-283 ◽  
Author(s):  
M. Milani ◽  
C. Riccardi ◽  
D. Drobne ◽  
A. Ciardi ◽  
P. Esena ◽  
...  

2019 ◽  
Vol 24 ◽  
pp. 258
Author(s):  
M. Lykiardopoulou ◽  
K. Tsampa ◽  
T. J. Mertzimekis

We report on the construction and ion-beam characterization of nuclear targets and thin films as part of the ongoing NuSTRAP group research program at the University of Athens. Two different techniques were used for the preparation of new targets, depending on the desired material and thickness. Self-supported, natural silver targets were manufactured by Physical Evaporation Deposition (PVD) through electrical resistance heating, using the evaporation apparatus at the INPP (NCSR “Demokritos”). Thick iron targets were constructed using the rolling technique at the INRASTES (NCSR “Demokritos”) facilities. The Rutherford Backscattering Spectrometry (RBS) was employed to characterize the newly manufactured and existing targets using proton and deuteron beams accelerated by the Tandem Van de Graff Accelerator (at INPP) at several energies. The results from the analysis of experimental spectra and corresponding simulations carried out with the simNRA software package are presented.


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