Determination of optical properties of nitrogen-doped hydrogenated amorphous carbon films by spectroscopic ellipsometry

2001 ◽  
Vol 78 (25) ◽  
pp. 3962-3964 ◽  
Author(s):  
Y. Hayashi ◽  
G. Yu ◽  
M. M. Rahman ◽  
K. M. Krishna ◽  
T. Soga ◽  
...  
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