Comparative study on the effects of ion density and ion energy on diamond-like carbon deposited by electron cyclotron resonance chemical vapor deposition

S. F. Yoon; K. H. Tan;  Rusli; J. Ahn; Q. F. Huang

doi:10.1063/1.1359163

Comparative study on the effects of ion density and ion energy on diamond-like carbon deposited by electron cyclotron resonance chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1359163 ◽

2001 ◽

Vol 89 (9) ◽

pp. 4830-4835 ◽

Cited By ~ 10

Author(s):

S. F. Yoon ◽

K. H. Tan ◽

Rusli ◽

J. Ahn ◽

Q. F. Huang

Keyword(s):

Chemical Vapor Deposition ◽

Comparative Study ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Ion Density ◽

Ion Energy

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A comparative study on the properties of TiN films prepared by chemical vapor deposition enhanced by r.f. plasma and by electron cyclotron resonance plasma

Thin Solid Films ◽

10.1016/s0040-6090(96)09098-0 ◽

1997 ◽

Vol 292 (1-2) ◽

pp. 124-129 ◽

Cited By ~ 9

Author(s):

Jong-Seok Kim ◽

Byung-Hyuk Jun ◽

Eung-Jik Lee ◽

Chan-Yong Hwang ◽

Won-Jong Lee

Keyword(s):

Chemical Vapor Deposition ◽

Comparative Study ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Tin Films ◽

Resonance Plasma

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Effect of microwave power on diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(00)00360-5 ◽

2000 ◽

Vol 9 (12) ◽

pp. 2024-2030 ◽

Cited By ~ 24

Author(s):

S.F. Yoon ◽

K.H. Tan ◽

J. Rusli ◽

Ahn ◽

Q.F. Huang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Power ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon

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Deposition of diamond-like carbon films using the screen grid method in electron cyclotron resonance chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581560 ◽

1999 ◽

Vol 17 (1) ◽

pp. 121-124 ◽

Cited By ~ 9

Author(s):

S. F. Yoon ◽

Rusli ◽

J. Ahn ◽

Q. Zhang ◽

Y. S. Wu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Grid Method ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Screen Grid

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Dielectric properties of molybdenum-containing diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(02)00049-4 ◽

2002 ◽

Vol 409 (2) ◽

pp. 211-219 ◽

Cited By ~ 9

Author(s):

Q.F. Huang ◽

S.F. Yoon ◽

Rusli ◽

Q. Zhang ◽

J. Ahn

Keyword(s):

Chemical Vapor Deposition ◽

Dielectric Properties ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon

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A comparative study of Ar and H2 as carrier gases for the growth of SiC films on Si(100) by electron cyclotron resonance chemical vapor deposition at low temperature

Diamond and Related Materials ◽

10.1016/s0925-9635(01)00482-4 ◽

2001 ◽

Vol 10 (11) ◽

pp. 2075-2083 ◽

Cited By ~ 8

Author(s):

Wen-Horng Lee ◽

Jing-Cheng Lin ◽

Chiapyng Lee ◽

Huang-Chung Cheng ◽

Tri-Rung Yew

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Comparative Study ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Carrier Gases ◽

Sic Films

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Conduction mechanism in molybdenum-containing diamond-like carbon deposited using electron cyclotron resonance chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1308102 ◽

2000 ◽

Vol 88 (7) ◽

pp. 4191 ◽

Cited By ~ 27

Author(s):

Q. F. Huang ◽

S. F. Yoon ◽

Rusli ◽

H. Yang ◽

B. Gan ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Conduction Mechanism ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Diamond Like Carbon

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Modeling and analysis of hydrogen–methane plasma in electron cyclotron resonance chemical vapor deposition of diamond-like carbon

Journal of Applied Physics ◽

10.1063/1.1421038 ◽

2002 ◽

Vol 91 (1) ◽

pp. 40 ◽

Cited By ~ 19

Author(s):

S. F. Yoon ◽

K. H. Tan ◽

Rusli ◽

J. Ahn

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Modeling And Analysis

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Diamond-Like Carbon Thin Films Deposition on Glass Using an Electron Cyclotron Resonance (ECR) Microwave Chemical Vapor Deposition (CVD) System

Advanced Tribology ◽

10.1007/978-3-642-03653-8_270 ◽

2009 ◽

pp. 816-819

Author(s):

Guangan Zhang ◽

Liping Wang ◽

Pengxun Yan ◽

Junyan Zhang

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Carbon Thin Films

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Effect of process pressure on diamond-like carbon deposited using electron cyclotron resonance chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(01)01177-4 ◽

2001 ◽

Vol 396 (1-2) ◽

pp. 62-68 ◽

Cited By ~ 4

Author(s):

S.F Yoon ◽

K.H Tan ◽

Rusli ◽

J Ahn ◽

Q.F Huang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Process Pressure

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Growth characterization and properties of diamond-like carbon films by electron cyclotron resonance chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(01)01010-0 ◽

2001 ◽

Vol 392 (1) ◽

pp. 16-21 ◽

Cited By ~ 11

Author(s):

B.H Lung ◽

M.J Chiang ◽

M.H Hon

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Growth Characterization

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