scholarly journals Characterization of Si/SiO[sub 2] multilayer thin films by grazing incidence X-ray reflectivity

2001 ◽  
Author(s):  
Toshiyuki Fujimoto
Keyword(s):  
Thin Films ◽  
Grazing Incidence ◽  
Multilayer Thin Films ◽  
X Ray

Microstructure Characterization of Si/C Multilayer Thin Films

2013 ◽  
Vol 743-744 ◽  
pp. 910-914
Author(s):  
Ting Han ◽  
Geng Rong Chang ◽  
Yun Jin Sun ◽  
Fei Ma ◽  
Ke Wei Xu
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Multilayer Thin Films ◽  
X Ray Diffraction ◽  
X Ray ◽  
Post Annealing ◽  
Transmission Electron ◽  
Twin Defects ◽  
Modulation Ratio

Si/C multilayer thin films were prepared by magnetron sputtering and post-annealing in N2 atmosphere at 1100 for 1h. X-ray diffraction (XRD), Raman scattering and high-resolution transmission electron microscopy (HRTEM) were applied to study the microstructures of the thin films. For the case of Si/C modulation ratio smaller than 1,interlayer diffusion is evident, which promotes the formation of α-SiC during thermal annealing. If the modulation ratio is larger than 1, the Si sublayers are partially crystallized, and the thicker the Si sublayers are, the crystallinity increases. To be excited, brick-shaped nc-Si is directly observed by HRTEM. The brick-shaped nc-Si appears to be more regular near the Si (100) substrate but with twin defects. The results are instructive in the application of solar cells.

Grazing-incidence X-Ray Analysis of Surfaces and Thin Films

1991 ◽  
Vol 35 (A) ◽  
pp. 143-150 ◽  
Author(s):  
T. C. Huang
Keyword(s):  
Thin Films ◽  
Depth Profiling ◽  
Grazing Incidence ◽  
Bragg Diffraction ◽  
Interface Roughness ◽  
Phase Identification ◽  
X Ray ◽  
Types Of Information

AbstractGrazing-incidence X-ray analysis techniques which are commonly used for the nondestructive characterization of surfaces and thin films are reviewed. The X-ray reflectivity technicue is used to study surface uniformity and oxidation, layer thickness and density, interface roughness and diffusion, etc. The grazing-incidence in-plane diffraction technique is used to determine in-plane crystallography of epitaxial films. The grazing-incidence asymmetric-Bragg diffraction is used for surface phase identification and structural depth profiling determination of polycrystalline films. Typical examples to illustrate the types of information that can be obtained by the techniques are presented.

The Characterization of Thin Films and Layered Structures Using X-RAY Absorption and Reflection at Grazing Incidence

1984 ◽  
Vol 37 ◽  
Author(s):  
S. M. Heald ◽  
J. M. Tranquada ◽  
D. O. Welch ◽  
H. Chen
Keyword(s):  
Thin Films ◽  
Fine Structure ◽  
High Resolution ◽  
Grazing Incidence ◽  
X Rays ◽  
X Ray ◽  
Surface And Interface ◽  
Interface Structures ◽  
X Ray Absorption

AbstractX-rays at grazing incidence have a short, controllable penetration depth and are well suited as a probe of surface and interface structures. This paper examines the possibility applying grazing-incidence reflectivity and Extended X-Ray Absorption Fine Structure (EXAFS) measurements to such systems. Results are presented for an Al-Cu couple for which both high resolution reflectivity and interface EXAFS measurements are made. The latter results are the first interface specific EXAFS data to be reported. Distinct changes in both signals are observed upon annealing, demonstrating the potential of the techniques.

Characterization of in-plane structures of vapor deposited thin-films of distyryl-oligothiophenes by grazing incidence x-ray diffractometry

2007 ◽  
Vol 42 (12) ◽  
pp. 1228-1231 ◽  
Author(s):  
Noriyuki Yoshimoto ◽  
Keijyu Aosawa ◽  
Toshinori Taniswa ◽  
Kazuhiko Omote ◽  
J. Ackermann ◽  
...  
Keyword(s):  
Thin Films ◽  
Grazing Incidence ◽  
X Ray

scholarly journals Diffusion Bonding of Ti6Al4V to Al2O3 Using Ni/Ti Reactive Multilayers

Metals ◽  
2021 ◽  
Vol 11 (4) ◽  
pp. 655
Author(s):  
Marcionilo Silva ◽  
Ana S. Ramos ◽  
M. Teresa Vieira ◽  
Sónia Simões
Keyword(s):  
Thin Films ◽  
Diffusion Bonding ◽  
Mechanical Characterization ◽  
Base Material ◽  
Microstructural Characterization ◽  
Multilayer Thin Films ◽  
X Ray ◽  
Distribution Maps ◽  
Base Materials

This paper aims to investigate the diffusion bonding of Ti6Al4V to Al2O3. The potential of the use of reactive nanolayered thin films will also be investigated. For this purpose, Ni/Ti multilayer thin films with a 50 nm modulation period were deposited by magnetron sputtering onto the base materials. Diffusion bonding experiments were performed at 800 °C, under 50 MPa and a dwell time of 60 min, with and without interlayers. Microstructural characterization of the interface was conducted through scanning electron microscopy (SEM) with energy-dispersive X-ray spectroscopy (EDS). The joints experiments without interlayer were unsuccessful. The interface is characterized by the presence of a crack close to the Al2O3 base material. The results revealed that the Ni/Ti reactive multilayers improved the diffusion bonding process, allowing for sound joints to be obtained at 800 °C for 60 min. The interface produced is characterized by a thin thickness and is mainly composed of NiTi and NiTi2 reaction layers. Mechanical characterization of the joint was assessed by hardness and reduced Young’s modulus distribution maps that enhance the different phases composing the interface. The hardness maps showed that the interface exhibits a hardness distribution similar to the Al2O3, which can be advantageous to the mechanical behavior of the joints.

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