Power spectral density functions for Si wafer surfaces using six measurement techniques
2013 ◽
Vol 770
(1)
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pp. 60
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2007 ◽
Vol 14
(8)
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pp. 561-563
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1977 ◽
Vol 13
(2)
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pp. 148-153
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Keyword(s):
1996 ◽
Vol 25
(3)
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pp. 303-315
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Keyword(s):
1980 ◽
Vol 61
(1)
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pp. 13-23
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1980 ◽
Vol 102
(3)
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pp. 264-270
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