Simulation of near-field photolithography using the finite-difference time-domain method

Shuji Tanaka; Masayuki Nakao; Mariko Umeda; Kenchi Ito; Shigeru Nakamura; Yotaro Hatamura

doi:10.1063/1.1351866

Simulation of near-field photolithography using the finite-difference time-domain method

Journal of Applied Physics ◽

10.1063/1.1351866 ◽

2001 ◽

Vol 89 (7) ◽

pp. 3547-3553 ◽

Cited By ~ 9

Author(s):

Shuji Tanaka ◽

Masayuki Nakao ◽

Mariko Umeda ◽

Kenchi Ito ◽

Shigeru Nakamura ◽

...

Keyword(s):

Finite Difference ◽

Time Domain ◽

Finite Difference Time Domain ◽

Near Field ◽

Time Domain Method ◽

Domain Method ◽

Difference Time

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Design of a Near-Field Probe for Optical Recording Using a 3-Dimensional Finite Difference Time Domain Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.973 ◽

2000 ◽

Vol 39 (Part 1, No. 2B) ◽

pp. 973-975 ◽

Cited By ~ 10

Author(s):

Kusato Hirota ◽

Tom D. Milster ◽

Yan Zhang ◽

J. Kevin Erwin

Keyword(s):

Finite Difference ◽

Time Domain ◽

Finite Difference Time Domain ◽

Near Field ◽

Optical Recording ◽

Time Domain Method ◽

3 Dimensional ◽

Domain Method ◽

Difference Time

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Improved near-field calculations using vectorial diffraction integrals in the finite-difference time-domain method

Journal of the Optical Society of America A ◽

10.1364/josaa.28.001776 ◽

2011 ◽

Vol 28 (8) ◽

pp. 1776 ◽

Cited By ~ 4

Author(s):

Ryan L. Coe ◽

Eric J. Seibel

Keyword(s):

Finite Difference ◽

Time Domain ◽

Finite Difference Time Domain ◽

Near Field ◽

Time Domain Method ◽

Domain Method ◽

Difference Time

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ANALYSIS OF NEAR-FIELD EMISSION WITHIN NANO-GAPS USING FINITE DIFFERENCE TIME DOMAIN METHOD

Proceedings of RAD-13. Proceedings of the 7th International Symposium on Radiative Transfer, June 2-8, 2013, Kusadasi, Turkey ◽

10.1615/ichmt.2013.intsympradtransf.280 ◽

2013 ◽

Author(s):

Azadeh Didari ◽

M. Pinar Menguc

Keyword(s):

Finite Difference ◽

Field Emission ◽

Time Domain ◽

Finite Difference Time Domain ◽

Near Field ◽

Time Domain Method ◽

Domain Method ◽

Difference Time

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Simulation of photodetection using finite-difference time-domain method with application to near-field subwavelength imaging based on nanoscale semiconductor photodetector array

Optical and Quantum Electronics ◽

10.1007/s11082-008-9190-0 ◽

2008 ◽

Vol 40 (5-6) ◽

pp. 343-347 ◽

Cited By ~ 3

Author(s):

Ki Young Kim ◽

Boyang Liu ◽

Yingyan Huang ◽

Seng-Tiong Ho

Keyword(s):

Finite Difference ◽

Time Domain ◽

Finite Difference Time Domain ◽

Near Field ◽

Time Domain Method ◽

Subwavelength Imaging ◽

Photodetector Array ◽

Domain Method ◽

Difference Time

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Validation of the finite-difference time-domain method for near-field bioelectromagnetic simulations

Microwave and Optical Technology Letters ◽

10.1002/(sici)1098-2760(19971220)16:6<341::aid-mop6>3.0.co;2-k ◽

1997 ◽

Vol 16 (6) ◽

pp. 341-345 ◽

Cited By ~ 5

Author(s):

Cynthia M. Furse ◽

Quishan Yu ◽

Om P. Gandhi

Keyword(s):

Finite Difference ◽

Time Domain ◽

Finite Difference Time Domain ◽

Near Field ◽

Time Domain Method ◽

Domain Method ◽

Difference Time

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Design of a near-field probe for optical recording using a three-dimensional finite-difference time-domain method

Joint International Symposium on Optical Memory and Optical Data Storage 1999 ◽

10.1117/12.997635 ◽

1999 ◽

Author(s):

Yan Zhang ◽

Kusato Hirota ◽

Tomas D. Milster

Keyword(s):

Finite Difference ◽

Time Domain ◽

Finite Difference Time Domain ◽

Near Field ◽

Three Dimensional ◽

Optical Recording ◽

Time Domain Method ◽

Domain Method ◽

Difference Time

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Robust multispectral transparency in continuous metal film structures via multiple near-field plasmon coupling by a finite-difference time-domain method

Physical Chemistry Chemical Physics ◽

10.1039/c3cp53703j ◽

2014 ◽

Vol 16 (9) ◽

pp. 4320 ◽

Cited By ~ 69

Author(s):

Gui-qiang Liu ◽

Ying Hu ◽

Zheng-qi Liu ◽

Yuan-hao Chen ◽

Zheng-jie Cai ◽

...

Keyword(s):

Finite Difference ◽

Time Domain ◽

Finite Difference Time Domain ◽

Metal Film ◽

Near Field ◽

Time Domain Method ◽

Plasmon Coupling ◽

Domain Method ◽

Difference Time ◽

Continuous Metal

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Design of metal-cladded near-field fiber probes with a dispersive body-of-revolution finite-difference time-domain method

Applied Optics ◽

10.1364/ao.44.003429 ◽

2005 ◽

Vol 44 (17) ◽

pp. 3429 ◽

Cited By ~ 10

Author(s):

Liu Liu ◽

Sailing He

Keyword(s):

Finite Difference ◽

Time Domain ◽

Finite Difference Time Domain ◽

Near Field ◽

Time Domain Method ◽

Body Of Revolution ◽

Domain Method ◽

Fiber Probes ◽

Difference Time

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A Leapfrog Scheme for Complying-Divergence Implicit Finite-Difference Time-Domain Method

IEEE Antennas and Wireless Propagation Letters ◽

10.1109/lawp.2021.3065520 ◽

2021 ◽

pp. 1-1

Author(s):

Eng Leong Tan

Keyword(s):

Finite Difference ◽

Time Domain ◽

Finite Difference Time Domain ◽

Time Domain Method ◽

Domain Method ◽

Implicit Finite Difference ◽

Leapfrog Scheme ◽

Difference Time

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Characteristics and optimal miter of microstrip bend via the finite difference time domain method

2009 3rd IEEE International Symposium on Microwave, Antenna, Propagation and EMC Technologies for Wireless Communications ◽

10.1109/mape.2009.5355759 ◽

2009 ◽

Author(s):

Jianbo Mao ◽

Mingwu Yang ◽

Huaguo Liang ◽

Jinxian Liu ◽

Meng Zhang

Keyword(s):

Finite Difference ◽

Time Domain ◽

Finite Difference Time Domain ◽

Time Domain Method ◽

Domain Method ◽

Difference Time

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