Application of sheet shaped plasma supplemented with radio frequency plasma source for production of thin films

2000 ◽  
Vol 71 (12) ◽  
pp. 4483 ◽  
Author(s):  
Kanetoshi Shibata ◽  
Hiroaki Ito ◽  
Noboru Yugami ◽  
Yasushi Nishida ◽  
Tadaomi Miyazaki
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

scholarly journals Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source

2011 ◽  
Vol 18 ◽  
pp. 100-106 ◽  
Author(s):  
Xingcun Li ◽  
Qiang Chen ◽  
Lijun Sang ◽  
Lizhen Yang ◽  
Zhongwei Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Radio Frequency ◽  
Atomic Layer ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Layer Deposition ◽  
Frequency Plasma

Nitrogen doping of molecular beam epitaxially grown CdTe with a radio-frequency plasma source

1994 ◽  
Vol 138 (1-4) ◽  
pp. 443-447 ◽  
Author(s):  
K.A. Dhese ◽  
D.E. Ashenford ◽  
J.E. Nicholls ◽  
P. Devine ◽  
B. Lunn ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Nitrogen Doping ◽  
Molecular Beam ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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