Anomalous skin effect and collisionless power dissipation in inductively coupled discharges

2001 ◽  
Vol 89 (7) ◽  
pp. 3580-3589 ◽  
Author(s):  
G. Cunge ◽  
B. Crowley ◽  
D. Vender ◽  
M. M. Turner
1962 ◽  
Vol 27 (4) ◽  
pp. 842-843 ◽  
Author(s):  
Sadao Nakajima ◽  
Mitsuo Watabe

1972 ◽  
Vol 43 (7) ◽  
pp. 2996-3001 ◽  
Author(s):  
G. R. Henry

Micromachines ◽  
2021 ◽  
Vol 12 (7) ◽  
pp. 834
Author(s):  
Nan Yu ◽  
Renaud Jourdain ◽  
Mustapha Gourma ◽  
Fangda Xu ◽  
Adam Bennett ◽  
...  

This paper focuses on the power dissipation of a plasma torch used for an optical surface fabrication process. The process utilizes an inductively coupled plasma (ICP) torch that is equipped with a De-Laval nozzle for the delivery of a highly collimated plasma jet. The plasma torch makes use of a self-igniting coil and an intermediate co-axial tube made of alumina. The torch has a distinctive thermal and electrical response compared to regular ICP torches. In this study, the results of the power dissipation investigation reveal the true efficiency of the torch and discern its electrical response. By systematically measuring the coolant parameters (temperature change and flow rate), the power dissipation is extrapolated. The radio frequency power supply is set to 800 W, E mode, throughout the research presented in this study. The analytical results of power dissipation, derived from the experiments, show that 15.4% and 33.3% are dissipated by the nozzle and coil coolant channels, respectively. The experiments also enable the determination of the thermal time constant of the plasma torch for the entire range of RF power.


The anomalous skin effect arises in good conductors at low temperatures and high frequencies when the electronic mean free path becomes comparable with or greater than the classically calculated skin depth. Measurements have been made on a number of metals at frequencies of 1200 and 3600 Mc/s, and the form of variation of r. f. surface conductance with d. c. conductivity agrees well with that predicted theoretically by Reuter & Sondheimer, assuming that the electrons are scattered diffusely when they hit the surface of the metal. From the results, estimates are made of the effective value of σ/ l , the ratio of d. c. conductivity to mean free path, and hence of the free surface area of the occupied region of k -space. The estimate for copper agrees well with that expected theoretically; those for silver and gold are rather lower than the theoretical values. For the other metals investigated, tin, cadmium, lead and aluminium, no theoretical estimates are available. The results are very sensitive to the presence of surface imperfections; the effect of these is discussed.


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