Amorphous silicon air-gap resonators on large-area substrates
2020 ◽
Vol 90
(3)
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pp. 30502
1994 ◽
Vol 33
(Part 1, No. 7B)
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pp. 4226-4231
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Keyword(s):
2003 ◽
Vol 42
(Part 2, No. 11A)
◽
pp. L1312-L1314
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Keyword(s):
Keyword(s):
2003 ◽
Vol 500
(1-3)
◽
pp. 351-361
◽
Keyword(s):
1982 ◽
pp. 769-772
Keyword(s):