Molecular dynamics simulations of Si etching with energetic F+: Sensitivity of results to the interatomic potential
2019 ◽
Vol 165
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pp. 74-81
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2014 ◽
Vol 16
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pp. 14150-14160
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Vol 121
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pp. 13008-13017
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2004 ◽
Vol 16
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pp. 8399-8407
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