Electron energy control in an inductively coupled plasma at low pressures

2000 ◽  
Vol 76 (10) ◽  
pp. 1246-1248 ◽  
Author(s):  
Haruo Shindo ◽  
Takuya Urayama ◽  
Takashi Fujii ◽  
Yasuhiro Horiike ◽  
Syuitsu Fujii
Keyword(s):  
Electron Energy ◽  
Inductively Coupled Plasma ◽  
Energy Control ◽  
Inductively Coupled ◽  
Low Pressures

Electron Energy Control in Inductively Coupled Plasma Employing Multimode Antenna

1999 ◽  
Vol 38 (Part 2, No. 9A/B) ◽  
pp. L1066-L1069 ◽  
Author(s):  
Haruo Shindo ◽  
Takuya Urayama ◽  
Takashi Fujii ◽  
Yasuhiro Horiike ◽  
Syuitsu Fujii
Keyword(s):  
Electron Energy ◽  
Inductively Coupled Plasma ◽  
Energy Control ◽  
Inductively Coupled

Electron energy flux control using dual power in side-type inductively coupled plasma

2011 ◽  
Vol 18 (7) ◽  
pp. 073507 ◽  
Author(s):  
Jin-Young Bang ◽  
Jin-Yong Kim ◽  
Chin-Wook Chung
Keyword(s):  
Electron Energy ◽  
Energy Flux ◽  
Inductively Coupled Plasma ◽  
Flux Control ◽  
Inductively Coupled ◽  
Dual Power

Electron energy distributions in a magnetized inductively coupled plasma

2014 ◽  
Vol 21 (9) ◽  
pp. 093512 ◽  
Author(s):  
Sang-Heon Song ◽  
Yang Yang ◽  
Pascal Chabert ◽  
Mark J. Kushner
Keyword(s):  
Electron Energy ◽  
Inductively Coupled Plasma ◽  
Energy Distributions ◽  
Inductively Coupled

External control of electron energy distributions in a dual tandem inductively coupled plasma

2015 ◽  
Vol 118 (8) ◽  
pp. 083303 ◽  
Author(s):  
Lei Liu ◽  
Shyam Sridhar ◽  
Weiye Zhu ◽  
Vincent M. Donnelly ◽  
Demetre J. Economou ◽  
...  
Keyword(s):  
Electron Energy ◽  
Inductively Coupled Plasma ◽  
External Control ◽  
Energy Distributions ◽  
Inductively Coupled
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