The role of particle energy and pulsed particle flux in physical vapor deposition and pulsed–laser deposition
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2007 ◽
Vol 254
(4)
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pp. 1228-1231
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2012 ◽
Vol 423-424
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pp. 21-27
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2007 ◽
Vol 361-363
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pp. 175-178
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2002 ◽
Vol 11
(3-6)
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pp. 1223-1226
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