Dielectric properties of metal-organic chemical vapor deposited highly textured Pb(ScTa)1−xTixO3 (x=0–0.3) relaxor ferroelectric thin films on LaNiO3 electrode buffered Si

C. H. Lin; S. W. Lee; Haydn Chen; T. B. Wu

doi:10.1063/1.125056

Dielectric properties of metal-organic chemical vapor deposited highly textured Pb(ScTa)1−xTixO3 (x=0–0.3) relaxor ferroelectric thin films on LaNiO3 electrode buffered Si

Applied Physics Letters ◽

10.1063/1.125056 ◽

1999 ◽

Vol 75 (16) ◽

pp. 2485-2487 ◽

Cited By ~ 10

Author(s):

C. H. Lin ◽

S. W. Lee ◽

Haydn Chen ◽

T. B. Wu

Keyword(s):

Thin Films ◽

Dielectric Properties ◽

Chemical Vapor ◽

Relaxor Ferroelectric ◽

Ferroelectric Thin Films ◽

Organic Chemical ◽

Chemical Vapor Deposited ◽

Metal Organic ◽

Lanio3 Electrode

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Ferroelectric and reliability properties of metal-organic chemical vapor deposited Pb(Zr0.15Ti0.85)O3 thin films grown in the self-regulation process window

Applied Physics Letters ◽

10.1063/1.2198487 ◽

2006 ◽

Vol 88 (17) ◽

pp. 172904 ◽

Cited By ~ 8

Author(s):

Jin Shi Zhao ◽

Hyun Ju Lee ◽

Joon Seop Sim ◽

Keun Lee ◽

Cheol Seong Hwang

Keyword(s):

Thin Films ◽

Self Regulation ◽

Chemical Vapor ◽

The Self ◽

Process Window ◽

Organic Chemical ◽

Regulation Process ◽

Chemical Vapor Deposited ◽

Metal Organic

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Some unusual behavior of dielectric properties of SrTiO3 metal organic chemical vapor deposition grown thin films

Journal of Applied Physics ◽

10.1063/1.4894811 ◽

2014 ◽

Vol 116 (9) ◽

pp. 094101 ◽

Cited By ~ 4

Author(s):

D. Shreiber ◽

M. W. Cole ◽

E. Enriquez ◽

S. G. Hirsch ◽

E. Ngo ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Dielectric Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Unusual Behavior ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Effects of oxidants on the deposition and dielectric properties of the SrTiO3 thin films prepared by liquid source metal-organic chemical vapor deposition (MOCVD)

Integrated Ferroelectrics ◽

10.1080/10584589608013063 ◽

1996 ◽

Vol 12 (2-4) ◽

pp. 199-213 ◽

Cited By ~ 8

Author(s):

Cheol Seong Hwang ◽

Chang Seok Kang ◽

Hag-Ju Cho ◽

Soon Oh Park ◽

Byoung Taek Lee ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Dielectric Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Liquid Source ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Effect of substrate temperature on structural and electrical properties of liquid-delivery metal organic chemical vapor deposited indium oxide thin films on silicon

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2905238 ◽

2008 ◽

Vol 26 (3) ◽

pp. 909 ◽

Cited By ~ 4

Author(s):

S. Venkat ◽

N. Pammi ◽

B. S. Sahu ◽

Nak-Jin Seong ◽

Soon-Gil Yoon

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Substrate Temperature ◽

Indium Oxide ◽

Chemical Vapor ◽

Organic Chemical ◽

Oxide Thin Films ◽

Chemical Vapor Deposited ◽

Structural And Electrical Properties ◽

Metal Organic

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Study on the defects in metal–organic chemical vapor deposited zinc tin oxide thin films using negative bias illumination stability analysis

Journal of Materials Chemistry C ◽

10.1039/c3tc31323a ◽

2013 ◽

Vol 1 (40) ◽

pp. 6695 ◽

Cited By ~ 11

Author(s):

Un Ki Kim ◽

Sang Ho Rha ◽

Jeong Hwan Kim ◽

Yoon Jang Chung ◽

Jisim Jung ◽

...

Keyword(s):

Thin Films ◽

Stability Analysis ◽

Tin Oxide ◽

Chemical Vapor ◽

Organic Chemical ◽

Negative Bias ◽

Oxide Thin Films ◽

Chemical Vapor Deposited ◽

Zinc Tin Oxide ◽

Metal Organic

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Dielectric properties of (Ba,Sr)TiO/sub 3/ thin films deposited on Ni/TiN/Si substrate by photo-assisted metal organic chemical vapor deposition

ISAF 1998. Proceedings of the Eleventh IEEE International Symposium on Applications of Ferroelectrics (Cat. No.98CH36245) ◽

10.1109/isaf.1998.786632 ◽

2002 ◽

Author(s):

Y.M. Chen ◽

D. Ritums ◽

N.J. Wu ◽

A. Ignatiev

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Dielectric Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Si Substrate ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Controlled metal-organic chemical vapor deposition of ferroelectric thin films

ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076) ◽

10.1109/isaf.2000.942388 ◽

2002 ◽

Author(s):

D. Burgess ◽

F. Schienle ◽

J. Lindner ◽

M. Schumacher ◽

R. Barz ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Ferroelectric Thin Films ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Growth of gallium oxide thin films on silicon by the metal organic chemical vapor deposition method

Materials Science and Engineering B ◽

10.1016/j.mseb.2004.01.012 ◽

2004 ◽

Vol 110 (1) ◽

pp. 34-37 ◽

Cited By ~ 47

Author(s):

Hyoun Woo Kim ◽

Nam Ho Kim

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Gallium Oxide ◽

Chemical Vapor ◽

Organic Chemical ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Domain structure of epitaxial PbTiO3 thin films on LaAlO3(100) grown by metal organic chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.369203 ◽

1999 ◽

Vol 85 (2) ◽

pp. 853-860 ◽

Cited By ~ 12

Author(s):

Bi Ming Yen ◽

Haydn Chen

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Domain Structure ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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The Characteristics of Nitrogen Implanted Tungsten Film as a New Diffusion Barrier for Metal Organic Chemical Vapor Deposited Cu Metallization

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.6857 ◽

1995 ◽

Vol 34 (Part 1, No. 12B) ◽

pp. 6857-6860 ◽

Cited By ~ 1

Author(s):

Chul Soon Kwon ◽

Yong Tae Kim ◽

Suk-Ki Min ◽

In Hoon Choi

Keyword(s):

Diffusion Barrier ◽

Chemical Vapor ◽

Organic Chemical ◽

Cu Metallization ◽

Tungsten Film ◽

Chemical Vapor Deposited ◽

Metal Organic

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