Nonconservative Ostwald ripening of dislocation loops in silicon

1998 ◽  
Vol 73 (20) ◽  
pp. 2956-2958 ◽  
Author(s):  
Y. L. Huang ◽  
M. Seibt ◽  
B. Plikat
Keyword(s):  
Ostwald Ripening ◽  
Dislocation Loops

On the Energetics of Extrinsic Defects in Si and their Role in Nonequilibrium Dopant Diffusion

2000 ◽  
Vol 610 ◽  
Author(s):  
Alain Claverie ◽  
Filadelfo Cristiano ◽  
Benjamin Colombeau ◽  
Nicholas Cowern
Keyword(s):  
Formation Energy ◽  
Ostwald Ripening ◽  
High Dose ◽  
Extended Defects ◽  
Dislocation Loops ◽  
Dynamical Equilibrium ◽  
Defect Interactions ◽  
Small Clusters ◽  
Dose Levels ◽  
Extrinsic Defects

AbstractIn this paper, we discuss the mechanisms by which small clusters evolve through “magic” sizes into {113} defects and then, at sufficiently high dose levels, transform into dislocation loops of two types. This ripening process is mediated by the interchange of free Si(int)s between different extended defects, leading to a decrease of their formation energy. The calculation of the supersaturation of free Si-interstitials in dynamical equilibrium with these defects shows a hierarchy of levels of nonequilibrium diffusion, ranging from supersaturations S of about 106 in the presence of small clusters, through 103 in the presence of {113} defects, to S in the range 100 down to 1 as loops are formed, evolve and finally evaporate. A detailed analysis of defect energetics has been carried out and it is shown that Ostwald ripening is the key concept for understanding and modelling defect interactions during TED of dopants in silicon.

Ostwald ripening of interstitial-type dislocation loops in 4H-silicon carbide

2006 ◽  
Vol 100 (5) ◽  
pp. 053521 ◽  
Author(s):  
P. O. Å. Persson ◽  
L. Hultman ◽  
M. S. Janson ◽  
A. Hallén
Keyword(s):  
Silicon Carbide ◽  
Ostwald Ripening ◽  
Dislocation Loops ◽  
Type Dislocation

Atomistic simulations of extrinsic defects evolution and transient enhanced diffusion in silicon

2001 ◽  
Vol 669 ◽  
Author(s):  
A. Claverie ◽  
B. Colombeau ◽  
F. Cristiano ◽  
A. Altibelli ◽  
C. Bonafos
Keyword(s):  
Ostwald Ripening ◽  
Physical Modelling ◽  
Defect Layer ◽  
Low Energy ◽  
Atomistic Simulations ◽  
Correct Prediction ◽  
Dislocation Loops ◽  
Enhanced Diffusion ◽  
Loss Term ◽  
Extrinsic Defects

ABSTRACTWe have implemented an atomistic simulation of the Ostwald ripening of extrinsic defects (clusters, {113}'s and dislocation loops) which occurs during annealing of ion implanted silicon. Our model describes the concomitant time evolution of the defects and of the supersaturation of Si interstitial atoms in the region. It accounts for the capture and emission of these interstitials to and from extrinsic defects (defined by their formation energy) of sizes up to thousands of atoms and includes a loss term due to the interstitial flux to the surface. This model reproduces well the dissolution of {113} defects in Si implanted wafers. We have subsequently studied the characteristics of TED in the case of B implantation at low and ultra low energy. In such cases, the distance between the defect layer and the surface plays a crucial role in determining the TED decay time. The simulations show that defect dissolution occurs earlier and for smaller sizes in the ultra-low energy regime. Under such conditions, TED is mostly characterized by its “pulse” component which takes place at the very beginning of the anneal, probably during the ramping up. In summary, we have shown that the physical modelling of the formation and of the growth of extrinsic defects leads to a correct prediction of the “source term” of Si interstitials and at the origin of TED.

A Physically Based Modeling of Boron TED in Amorphised Si

2000 ◽  
Vol 610 ◽  
Author(s):  
Evelyne Lampin ◽  
Vincent Senez ◽  
Alain Claveriel
Keyword(s):  
Ostwald Ripening ◽  
Physically Based Modeling ◽  
Extended Defects ◽  
Dislocation Loops ◽  
Boron Diffusion ◽  
Experimental Conditions ◽  
Physically Based ◽  
Free Interstitial ◽  
Recombination Velocity ◽  
Process Simulator

AbstractWe have developed a physically based modeling of TED of implanted boron in amorphised Si. The simulation starts with a supersaturation of Si free interstitials located below the amorphous/crystalline interface which, upon annealing, tend to diffuse out or to precipitate in the form of extended defects (clusters, {113}s, dislocation loops). The modeling of the nucleation and growth of these defects is divided into three distinct stages: the nucleation, the “pure growth” and the Ostwald ripening. This system can interact with a surface (characterized by a given recombination velocity for Si interstitials) only after the SPE regrowth is completed. Implementation of this model into a process simulator allows to describe the isothermal and isochronal evolutions of the sizes and of the densities of dislocation loops in agreement with TEM observations. Assuming that boron diffusion is caused by the concomitant time and space variations of the free interstitial supersaturation in the wafer, TED can be accurately predicted for a variety of experimental conditions.

Transient Enhanced Diffusion of Dopants in Preamorphised Si Layers

1996 ◽  
Vol 438 ◽  
Author(s):  
A. Claverie ◽  
C. Bonafos ◽  
M. Omri ◽  
B. De Mauduit ◽  
G. Ben Assayag ◽  
...  
Keyword(s):  
Ostwald Ripening ◽  
Dislocation Loops ◽  
Boron Diffusion ◽  
Enhanced Diffusion ◽  
Transient Enhanced Diffusion ◽  
Interstitial Atoms ◽  
Extrinsic Dislocation ◽  
The Mean ◽  
Boron Diffusivity ◽  
Shed Light

AbstractTransient Enhanced Diffusion (TED) of dopants in Si is the consequence of the evolution, upon annealing, of a large supersaturation of Si self-interstitial atoms left after ion bombardment. In the case of amorphizing implants, this supersaturation is located just beneath the c/a interface and evolves through the nucleation and growth of End-Of-Range (EOR) defects.For this reason, we discuss here the relation between TED and EOR defects. Modelling of the behavior of these defects upon annealing allows one to understand why and how they affect dopant diffusion. This is possible through the development of the Ostwald ripening theory applied to extrinsic dislocation loops. This theory is shown to be readily able to quantitatively describe the evolution of the defect population (density, size) upon annealing and gives access to the variations of the mean supersaturation of Si self-interstitial atoms between the loops and responsible for TED. This initial supersaturation is, before annealing, at least 5 decades larger than the equilibrium value and exponentially decays with time upon annealing with activation energies that are the same than the ones observed for TED. It is shown that this time decay is precisely at the origin of the transient enhancement of boron diffusivity through the interstitial component of boron diffusion. Side experiments shed light on the effect of the proximity of a free surface on the thermal behavior of EOR defects and allow us to quantitatively describe the space and time evolutions of boron diffusivity upon annealing of preamorphised Si layers.

Transient Enhanced Diffusion of Dopants in Preamorphised Si Layers

1996 ◽  
Vol 439 ◽  
Author(s):  
A. Claverie ◽  
C. Bonafos ◽  
M. Omri ◽  
B. De Mauduit ◽  
G. Ben Assayag ◽  
...  
Keyword(s):  
Ostwald Ripening ◽  
Dislocation Loops ◽  
Boron Diffusion ◽  
Enhanced Diffusion ◽  
Transient Enhanced Diffusion ◽  
Interstitial Atoms ◽  
Extrinsic Dislocation ◽  
The Mean ◽  
Boron Diffusivity ◽  
Shed Light

AbstractTransient Enhanced Diffusion (TED) of dopants in Si is the consequence of the evolution, upon annealing, of a large supersaturation of Si self-interstitial atoms left after ion bombardment. In the case of amorphizing implants, this supersaturation is located just beneath the c/a interface and evolves through the nucleation and growth of End-Of-Range (EOR) defects.For this reason, we discuss here the relation between TED and EOR defects. Modelling of the behavior of these defects upon annealing allows one to understand why and how they affect dopant diffusion. This is possible through the development of the Ostwald ripening theory applied to extrinsic dislocation loops. This theory is shown to be readily able to quantitatively describe the evolution of the defect population (density, size) upon annealing and gives access to the variations of the mean supersaturation of Si self-interstitial atoms between the loops and responsible for TED. This initial supersaturation is, before annealing, at least 5 decades larger than the equilibrium value and exponentially decays with time upon annealing with activation energies that are the same than the ones observed for TED. It is shown that this time decay is precisely at the origin of the transient enhancement of boron diffusivity through the interstitial component of boron diffusion. Side experiments shed light on the effect of the proximity of a free surface on the thermal behavior of EOR defects and allow us to quantitatively describe the space and time evolutions of boron diffusivity upon annealing of preamorphised Si layers.

Application of Modified Bloch Waves to Image Analysis of Extended Linear Defects

1974 ◽  
Vol 32 ◽  
pp. 402-403
Author(s):  
S. Nakahara ◽  
D. M. Maher
Keyword(s):  
Image Analysis ◽  
Computational Approach ◽  
Dislocation Loops ◽  
Plane Wave Expansion ◽  
Dynamical Equations ◽  
Bloch Waves ◽  
Linear Defects ◽  
Imperfect Crystal ◽  
Localized Defects ◽  
Defective Crystals

Since Head first demonstrated the advantages of computer displayed theoretical intensities from defective crystals, computer display techniques have become important in image analysis. However the computational methods employed resort largely to numerical integration of the dynamical equations of electron diffraction. As a consequence, the interpretation of the results in terms of the defect displacement field and diffracting variables is difficult to follow in detail. In contrast to this type of computational approach which is based on a plane-wave expansion of the excited waves within the crystal (i.e. Darwin representation ), Wilkens assumed scattering of modified Bloch waves by an imperfect crystal. For localized defects, the wave amplitudes can be described analytically and this formulation has been used successfully to predict the black-white symmetry of images arising from small dislocation loops.

Annealing Of Radiation Damage in Tungsten

1970 ◽  
Vol 28 ◽  
pp. 412-413
Author(s):  
Robert C. Rau ◽  
John Moteff
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Radiation Damage ◽  
Thermal Annealing ◽  
Neutron Fluence ◽  
Dislocation Loops ◽  
Defect Clusters ◽  
Polycrystalline Tungsten ◽  
Transmission Electron ◽  
Radiation Induced

Transmission electron microscopy has been used to study the thermal annealing of radiation induced defect clusters in polycrystalline tungsten. Specimens were taken from cylindrical tensile bars which had been irradiated to a fast (E > 1 MeV) neutron fluence of 4.2 × 1019 n/cm2 at 70°C, annealed for one hour at various temperatures in argon, and tensile tested at 240°C in helium. Foils from both the unstressed button heads and the reduced areas near the fracture were examined.Figure 1 shows typical microstructures in button head foils. In the unannealed condition, Fig. 1(a), a dispersion of fine dot clusters was present. Annealing at 435°C, Fig. 1(b), produced an apparent slight decrease in cluster concentration, but annealing at 740°C, Fig. 1(C), resulted in a noticeable densification of the clusters. Finally, annealing at 900°C and 1040°C, Figs. 1(d) and (e), caused a definite decrease in cluster concentration and led to the formation of resolvable dislocation loops.

Heterogeneous Precipitation at Dislocations

1969 ◽  
Vol 27 ◽  
pp. 70-71
Author(s):  
A. K. Eikum
Keyword(s):  
Electron Microscopy ◽  
Room Temperature ◽  
Dislocation Loops ◽  
Silver Alloys ◽  
Heterogeneous Precipitation ◽  
Precipitation Phenomena ◽  
Aluminum Base ◽  
Silver Atoms

Precipitation phenomena in concentrated aluminum-base silver alloys have been studied with a variety of techniques including electron microscopy. The purpose of the present work was to investigate the dislocation reactions that occur as silver atoms precipitate (or segregate) under a relatively low supersaturation. Specimens (0.1 mm thick) of Al-1 at. % Ag were quenched from ~500°C into an oil bath at room temperature and aged 30 min. at 265°C. The initial configurations available as sites for heterogeneous precipitation will therefore include perfect prismatic dislocation loops, Frank sessile loops and random segments of grown-in dislocations.

Weak Beam Imaging and Diffraction Studies of Stacking Faults in Silicon

1976 ◽  
Vol 34 ◽  
pp. 590-591
Author(s):  
T. Y. Tan ◽  
W. K. Tice
Keyword(s):  
Fast Neutron ◽  
Rapid Determination ◽  
Stacking Faults ◽  
Imaging Method ◽  
Large Reduction ◽  
Dislocation Loops ◽  
Fringe Spacing ◽  
Weak Beam ◽  
Kinematical Theory

In studying ion implanted semiconductors and fast neutron irradiated metals, the need for characterizing small dislocation loops having diameters of a few hundred angstrom units usually arises. The weak beam imaging method is a powerful technique for analyzing these loops. Because of the large reduction in stacking fault (SF) fringe spacing at large sg, this method allows for a rapid determination of whether the loop is faulted, and, hence, whether it is a perfect or a Frank partial loop. This method was first used by Bicknell to image small faulted loops in boron implanted silicon. He explained the fringe spacing by kinematical theory, i.e., ≃l/(Sg) in the fault fringe in depth oscillation. The fault image contrast formation mechanism is, however, really more complicated.

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