High-speed maskless laser patterning of indium tin oxide thin films

1998 ◽  
Vol 73 (18) ◽  
pp. 2558-2560 ◽  
Author(s):  
O. Yavas ◽  
M. Takai
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
High Speed ◽  
Oxide Thin Films ◽  
Laser Patterning

Ultrashort pulse laser patterning of indium tin oxide thin films on glass by uniform diffractive beam patterns

2012 ◽  
Vol 258 (19) ◽  
pp. 7601-7606 ◽  
Author(s):  
Zheng Kuang ◽  
Walter Perrie ◽  
Dun Liu ◽  
Paul Fitzsimons ◽  
Stuart P. Edwardson ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulse Laser ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ultrashort Pulse ◽  
Oxide Thin Films ◽  
Ultrashort Pulse Laser ◽  
Laser Patterning ◽  
Beam Patterns

High-Speed Etching of Indium-Tin-Oxide Thin Films Using an Inductively Coupled Plasma

1994 ◽  
Vol 33 (Part 1, No. 7B) ◽  
pp. 4438-4441 ◽  
Author(s):  
Keiji Nakamura ◽  
Tomonori Imura ◽  
Hideo Sugai ◽  
Michiko Ohkubo ◽  
Katsutaro Ichihara
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Inductively Coupled Plasma ◽  
High Speed ◽  
Oxide Thin Films ◽  
Inductively Coupled

Laser patterning of very thin indium tin oxide thin films on PET substrates

2015 ◽  
Vol 359 ◽  
pp. 567-575 ◽  
Author(s):  
C. McDonnell ◽  
D.Milne ◽  
C. Prieto ◽  
H. Chan ◽  
D. Rostohar ◽  
...  
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Laser Patterning

Substrate-assisted laser patterning of indium tin oxide thin films

1999 ◽  
Vol 69 (7) ◽  
pp. S875-S878 ◽  
Author(s):  
O. Yavas ◽  
C. Ochiai ◽  
M. Takai
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Laser Patterning

A detailed study of the mechanism of rapid laser patterning of indium tin oxide thin films

2008 ◽  
Author(s):  
Paul M. Harrison ◽  
Nick Hay ◽  
Duncan Hand ◽  
Jozef Wendland
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Laser Patterning

Laser Patterning Indium Tin Oxide Thin Films on Glass Substrate

2007 ◽  
Vol 364-366 ◽  
pp. 315-320 ◽  
Author(s):  
Ming Fei Chen ◽  
Yu Pin Chen ◽  
Wen Tse Hsiao ◽  
Zhi Peng Gu
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Glass Substrate ◽  
Laser Energy ◽  
Wet Etching ◽  
Plastic Substrate ◽  
Direct Writing ◽  
Oxide Thin Films ◽  
Laser Patterning

Laser patterning technology of indium tin oxide thin films has been studied in this research. ITO thin films, which usually coat on the glass and the plastic substrate, have been adopted in the flat panel displays (FPDs) and the plasma display planes. The conventional method of the ITO patterning usually uses the wet chemical etching processing. However, the wet etching processing is not adopted in the plastic materials because the chemical fluid usually damages the plastic substrate. The laser direct writing processing has been developed and replaces the wet etching processing. This investigation is interested in the laser patterning used the third-harmonic Nd:YAG laser (355 nm) to ablate the ITO films of glass substrate. The scanning electron microscope (SEM) measures the characterization of the ablated grooves used the different parameters, including the laser energy, the repetition rate and the feeding speed of the table. Finally, the effect parameters of laser ablating ITO film will be presented in this paper.

scholarly journals Hierarchical laser patterning of indium tin oxide thin films

2019 ◽  
Vol 9 (7) ◽  
pp. 3035 ◽  
Author(s):  
Nicholas Charipar ◽  
Raymond C. Y. Auyeung ◽  
Heungsoo Kim ◽  
Kristin Charipar ◽  
Alberto Piqué
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Laser Patterning

Laser patterning with beam shaping on indium tin oxide thin films of glass/plastic substrate

2009 ◽  
Vol 518 (4) ◽  
pp. 1072-1078 ◽  
Author(s):  
Ming-Fei Chen ◽  
Wen-Tse Hsiao ◽  
Yu-Sen Ho ◽  
Shih-Feng Tseng ◽  
Yu-Pin Chen
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Beam Shaping ◽  
Plastic Substrate ◽  
Glass Plastic ◽  
Oxide Thin Films ◽  
Laser Patterning
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