Control of antenna coupling in high-density plasma production by m=0 helicon waves

1998 ◽  
Vol 73 (12) ◽  
pp. 1643-1645 ◽  
Author(s):  
Y. Sakawa ◽  
T. Takino ◽  
T. Shoji
1994 ◽  
Vol 33 (Part 1, No. 10) ◽  
pp. 5950-5958 ◽  
Author(s):  
Yasuyoshi Yasaka ◽  
Yoshiaki Hara

2001 ◽  
Vol 39 (1T) ◽  
pp. 167-170 ◽  
Author(s):  
M. Ichimura ◽  
S. Tanaka ◽  
C. Nakagawa ◽  
M. Nakamura ◽  
S. Saosaki ◽  
...  

1998 ◽  
Vol 69 (2) ◽  
pp. 980-982 ◽  
Author(s):  
M. Y. Tanaka ◽  
M. Bacal ◽  
M. Sasao ◽  
T. Kuroda

2009 ◽  
Vol 55 (2T) ◽  
pp. 106-109 ◽  
Author(s):  
Y. Yamaguchi ◽  
M. Ichimura ◽  
T. Ouchi ◽  
I. Kozawa ◽  
H. Muro ◽  
...  

2006 ◽  
Vol 506-507 ◽  
pp. 545-549 ◽  
Author(s):  
Y. Ohtsu ◽  
T. Shimazoe ◽  
T. Misawa ◽  
H. Fujita

2003 ◽  
Vol 10 (9) ◽  
pp. 3447-3450 ◽  
Author(s):  
Y. Sakawa ◽  
M. Ohshima ◽  
Y. Ohta ◽  
T. Shoji

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