In situ infrared ellipsometry study of hydrogenated amorphous carbon/Si interface formation

1998 ◽  
Vol 72 (7) ◽  
pp. 780-782 ◽  
Author(s):  
T. Heitz ◽  
B. Drévillon ◽  
J. E. Bourée ◽  
C. Godet
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