High‐speed and high‐sensitivity silicon‐on‐insulator metal‐semiconductor‐metal photodetector with trench structure
Keyword(s):
1986 ◽
Vol 44
◽
pp. 736-737
Keyword(s):
2019 ◽
Keyword(s):
Keyword(s):
1995 ◽
pp. 27-38
◽
Keyword(s):
Keyword(s):
2014 ◽
Vol 26
◽
pp. 506-511
◽
Keyword(s):