Line‐focus acoustic microscopy measurements of elastic constants for materials with high acoustic velocities

1996 ◽  
Vol 69 (24) ◽  
pp. 3680-3682 ◽  
Author(s):  
Ailie Tourlog ◽  
Wei Li ◽  
Jan D. Achenbach
Keyword(s):  
Elastic Constants ◽  
Acoustic Microscopy ◽  
Acoustic Velocities ◽  
Line Focus

Effective Elastic Constants of Superlattice Films Measured by Line-Focus Acoustic Microscopy

1995 ◽  
Vol 117 (4) ◽  
pp. 395-401 ◽  
Author(s):  
Jin O. Kim ◽  
Jan D. Achenbach ◽  
Meenam Shinn ◽  
Scott A. Barnett
Keyword(s):  
Elastic Constants ◽  
Calculation Method ◽  
Measurement Method ◽  
Acoustic Microscopy ◽  
Effective Elastic Constants ◽  
Dispersion Data ◽  
Rough Interfaces ◽  
Film Substrate ◽  
Sharp Interfaces ◽  
Line Focus

The effective elastic constants of single-crystal nitride superlattice films have been determined by calculation and by measurement methods. The calculation method uses formulas to calculate the effective elastic constants of superlattices from the measured elastic constants of the constituent layers. The calculated effective elastic constants are tested by comparing the corresponding surface acoustic wave (SAW) velocities calculated for thin-film/substrate systems with the corresponding SAW velocities measured by line-focus acoustic microscopy (LFAM). The measurement method determines the effective elastic constants of the superlattices directly from the SAW velocity dispersion data measured by LFAM. Two kinds of superlattice films are considered: one has relatively flat and sharp interfaces between layers, and the other has rough interfaces with interdiffusion. The calculation method has yielded very good results for the superlattices with flat and sharp interfaces but not for the superlattices with rough interfaces. The measurement method yields results for both kinds, with the restriction that the constituent layers have similar crystal symmetries.

Elastic constants of single‐crystal transition‐metal nitride films measured by line‐focus acoustic microscopy

1992 ◽  
Vol 72 (5) ◽  
pp. 1805-1811 ◽  
Author(s):  
J. O. Kim ◽  
J. D. Achenbach ◽  
P. B. Mirkarimi ◽  
M. Shinn ◽  
S. A. Barnett
Keyword(s):  
Transition Metal ◽  
Single Crystal ◽  
Elastic Constants ◽  
Acoustic Microscopy ◽  
Metal Nitride ◽  
Transition Metal Nitride ◽  
Crystal Transition ◽  
Line Focus
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