Infrared Raman scattering as a sensitive probe for the thermal conductivity of chemical vapor deposited diamond films

1996 ◽  
Vol 68 (11) ◽  
pp. 1482-1484 ◽  
Author(s):  
E. Wörner ◽  
J. Wagner ◽  
W. Müller‐Sebert ◽  
C. Wild ◽  
P. Koidl
Keyword(s):  
Thermal Conductivity ◽  
Raman Scattering ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Chemical Vapor Deposited

Thermal conductivity of dc‐plasma assisted chemical vapor deposited diamond films

1995 ◽  
Vol 78 (11) ◽  
pp. 6849-6851 ◽  
Author(s):  
Hee‐Baik Chae ◽  
Yong‐Jin Han ◽  
Dae‐Jin Seong ◽  
Jong‐Chul Kim ◽  
Young‐Joon Baik
Keyword(s):  
Thermal Conductivity ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Dc Plasma ◽  
Chemical Vapor Deposited

Growth-rate dependence of the thermal conductivity of chemical-vapor-deposited diamond

1999 ◽  
Vol 14 (9) ◽  
pp. 3720-3724 ◽  
Author(s):  
Naira M. Balzaretti ◽  
Albert Feldman ◽  
Edgar S. Etz ◽  
Roy Gat
Keyword(s):  
Thermal Conductivity ◽  
Growth Rate ◽  
Thermal Diffusivity ◽  
Microwave Plasma ◽  
Plasma Reactor ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Diamond Growth ◽  
Diffusivity Measurements ◽  
Chemical Vapor Deposited

The in-plane thermal diffusivity of chemical-vapor-deposited diamond films was measured as a function of diamond-growth rate. The films, 0.1–0.4 mm thick, were prepared in microwave-plasma reactor at growth rates ranging from 1 to 10 μm/h. A modification of Ångstöm's method was used to perform the diffusivity measurements. The thermal conductivity calculated from the thermal diffusivity shows an inverse relationship with growth rate. Analyses of Raman spectra indicate that both the line shifts and the line widths of the diamond Raman peak are practically independent of the deposition rate, except for the specimen grown at the highest growth rate.

The thermal conductivity of chemical‐vapor‐deposited diamond films on silicon

1992 ◽  
Vol 71 (7) ◽  
pp. 3143-3146 ◽  
Author(s):  
J. E. Graebner ◽  
J. A. Mucha ◽  
L. Seibles ◽  
G. W. Kammlott
Keyword(s):  
Thermal Conductivity ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Chemical Vapor Deposited

First-order Raman scattering in homoepitaxial chemical vapor deposited diamond at elevated temperatures

1992 ◽  
Vol 212 (1-2) ◽  
pp. 206-215 ◽  
Author(s):  
H. Herchen ◽  
M.A. Cappelli ◽  
M.I. Landstrass ◽  
M.A. Plano ◽  
M.D. Moyer
Keyword(s):  
Raman Scattering ◽  
Elevated Temperatures ◽  
Chemical Vapor ◽  
First Order ◽  
Chemical Vapor Deposited

Crystalline perfection of chemical vapor deposited diamond films

1990 ◽  
Vol 5 (8) ◽  
pp. 1591-1594 ◽  
Author(s):  
A. V. Hetherington ◽  
C. J. H. Wort ◽  
P. Southworth
Keyword(s):  
Grain Boundaries ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Stacking Faults ◽  
Chemical Vapor ◽  
Cvd Diamond ◽  
Growth Conditions ◽  
Crystalline Perfection ◽  
Planar Defects ◽  
Chemical Vapor Deposited

The crystalline perfection of microwave plasma assisted chemical vapor deposited (MPACVD) diamond films grown under various conditions has been examined by TEM. Most CVD diamond films thus far reported contain a high density of defects, predominantly twins and stacking faults on {111} planes. We show that under appropriate growth conditions, these planar defects are eliminated from the center of the crystallites, and occur only at grain boundaries where the growing crystallites meet.

Chemical-Vapor-Deposited Materials for High Thermal Conductivity Applications

MRS Bulletin ◽  
2001 ◽  
Vol 26 (6) ◽  
pp. 458-463 ◽  
Author(s):  
Jitendra S. Goela ◽  
Nathaniel E. Brese ◽  
Michael A. Pickering ◽  
John E. Graebner
Keyword(s):  
Thin Film ◽  
Thermal Conductivity ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
High Thermal Conductivity ◽  
Solid Materials ◽  
Chemical Vapor Deposited

Chemical vapor deposition (CVD) is an attractive method for producing bulk and thin-film materials for a variety of applications. In this method, gaseous reagents condense onto a substrate and then react to produce solid materials. The materials produced by CVD are theoretically dense, highly pure, and have other superior properties.

Sign in / Sign up

Export Citation Format

Share Document