Erratum: ‘‘Novel semiconductor substrate formed by hydrogen ion implantation into silicon’’ [Appl. Phys. Lett. 55, 2223 (1989)]

1995 ◽  
Vol 67 (3) ◽  
pp. 444-444 ◽  
Author(s):  
Jianming Li
Keyword(s):  
Ion Implantation ◽  
Hydrogen Ion ◽  
Semiconductor Substrate ◽  
Hydrogen Ion Implantation

The Influence Of Silicon Orientation On Surface Blistering Behaviors for Molecular Hydrogen Ion Implantation

2019 ◽  
Vol 34 (1) ◽  
pp. 1159-1164
Author(s):  
Yu Cheng Hsiao ◽  
Jenq-Horng Liang ◽  
Chih-Ming Lin
Keyword(s):  
Ion Implantation ◽  
Molecular Hydrogen ◽  
Hydrogen Ion ◽  
Hydrogen Ion Implantation

X-ray-emission study of the structure of Si:H layers formed by low-energy hydrogen-ion implantation

2002 ◽  
Vol 36 (5) ◽  
pp. 568-573 ◽  
Author(s):  
V. R. Galakhov ◽  
I. V. Antonova ◽  
S. N. Shamin ◽  
V. I. Aksenova ◽  
V. I. Obodnikov ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Low Energy ◽  
Hydrogen Ion ◽  
X Ray ◽  
Emission Study ◽  
Hydrogen Ion Implantation

scholarly journals Effects of hydrogen ion implantation dose on physical and electrical properties of Ge-on-insulator layers fabricated by the smart-cut process

AIP Advances ◽  
2020 ◽  
Vol 10 (1) ◽  
pp. 015045
Author(s):  
C.-M. Lim ◽  
Z. Zhao ◽  
K. Sumita ◽  
K. Toprasertpong ◽  
M. Takenaka ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Ion Implantation ◽  
Implantation Dose ◽  
Hydrogen Ion ◽  
Insulator Layers ◽  
Hydrogen Ion Implantation

A model for trapping and re-emission at hydrogen ion implantation

1994 ◽  
Vol 211 (2) ◽  
pp. 127-134 ◽  
Author(s):  
A.A. Pisarev ◽  
S.K. Zhdanov ◽  
O.V. Ogorodnikova
Keyword(s):  
Ion Implantation ◽  
Hydrogen Ion ◽  
Hydrogen Ion Implantation

Modification of electrical conductivity in RF magnetron sputtered ZnO films by low-energy hydrogen ion implantation

2006 ◽  
Vol 6 (3) ◽  
pp. 495-498 ◽  
Author(s):  
J. Kennedy ◽  
A. Markwitz ◽  
Z. Li ◽  
W. Gao ◽  
C. Kendrick ◽  
...  
Keyword(s):  
Electrical Conductivity ◽  
Ion Implantation ◽  
Low Energy ◽  
Hydrogen Ion ◽  
Zno Films ◽  
Hydrogen Ion Implantation
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