Kinetics and nucleation model of the C49 to C54 phase transformation in TiSi2 thin films on deep‐sub‐micron n+ type polycrystalline silicon lines

1995 ◽  
Vol 67 (16) ◽  
pp. 2308-2310 ◽  
Author(s):  
J. A. Kittl ◽  
D. A. Prinslow ◽  
P. P. Apte ◽  
M. F. Pas
Keyword(s):  
Thin Films ◽  
Phase Transformation ◽  
Polycrystalline Silicon ◽  
Nucleation Model

Phase transformation and preferred orientation in carboxylate derived ZrO2 thin films on silicon substates

1992 ◽  
Vol 7 (11) ◽  
pp. 3065-3071 ◽  
Author(s):  
Peir-Yung Chu ◽  
Isabelle Campion ◽  
Relva C. Buchanan
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
Phase Transformation ◽  
Heating Rate ◽  
Tetragonal Phase ◽  
Monoclinic Phase ◽  
Preferred Orientation ◽  
Si Substrate ◽  
Interfacial Diffusion ◽  
Deposited Films

Phase transformation and preferred orientation in ZrO2 thin films, deposited on Si(111) and Si(100) substrates, and prepared by heat treatment from carboxylate solution precursors were investigated. The deposited films were amorphous below 450 °C, transforming gradually to the tetragonal and monoclinic phases on heating. The monoclinic phase developed from the tetragonal phase displacively, and exhibited a strong (111) preferred orientation at temperature as low as 550 °C. The degree of preferred orientation and the tetragonal-to-monoclinic phase transformation were controlled by heating rate, soak temperature, and time. Interfacial diffusion into the film from the Si substrate was negligible at 700 °C and became significant only at 900 °C, but for films thicker than 0.5 μm, overall preferred orientation exceeded 90%.

Phase transformation in Cu2SnS3 (CTS) thin films through pre-treatment in sulfur atmosphere

2021 ◽  
Vol 32 (8) ◽  
pp. 10018-10027
Author(s):  
M. A. Olgar ◽  
B. M. Başol ◽  
M. Tomakin ◽  
E. Bacaksız
Keyword(s):  
Thin Films ◽  
Phase Transformation ◽  
Sulfur Atmosphere ◽  
Pre Treatment

Proton irradiation induced phase transformation in Ni-Mn-Ga thin films

2021 ◽  
Vol 266 ◽  
pp. 115078
Author(s):  
R. Ning ◽  
Z.P. Yang ◽  
Z.Y. Gao ◽  
X.Z. Cao ◽  
W. Cai
Keyword(s):  
Thin Films ◽  
Phase Transformation ◽  
Proton Irradiation

scholarly journals Paraelectric/antiferroelectric/ferroelectric phase transformation in As-deposited ZrO2 thin films by the TiN capping engineering

2020 ◽  
Vol 195 ◽  
pp. 109020
Author(s):  
Chun-Yuan Wang ◽  
Chin-I Wang ◽  
Sheng-Han Yi ◽  
Teng-Jan Chang ◽  
Chun-Yi Chou ◽  
...  
Keyword(s):  
Thin Films ◽  
Phase Transformation ◽  
Ferroelectric Phase

Fabrication of Polycrystalline Silicon on Glass from Fluorinated Precursors with the Aid of Atomic Hydrogen

1995 ◽  
Vol 403 ◽  
Author(s):  
T. Akasaka ◽  
D. He ◽  
I. Shimizu
Keyword(s):  
Thin Films ◽  
Atomic Hydrogen ◽  
Polycrystalline Silicon ◽  
In Situ Observation ◽  
Layer By Layer ◽  
High Quality ◽  
Deposition Parameters ◽  
Columnar Grains ◽  
Step Growth

AbstractHigh quality polycrystalline silicon was made on glass from fluorinated precursors by two step growth, i.e., (1) formation of seed crystals on glass by layer-by-layer(LL) technique and (2) grain-growth on the seeds. In LL technique, deposition of ultra-thin films and treatment with atomic hydrogen was repeated alternately. Columnar grains with 200 nm dia were grown epitaxy-like on the seeds by optimizing the deposition parameters under in situ observation with spectroscopic ellipsometry.

The effect of heating rate on the phase transformation of Ni/Ti multilayer thin films

Vacuum ◽  
2017 ◽  
Vol 139 ◽  
pp. 23-25 ◽  
Author(s):  
A.J. Cavaleiro ◽  
A.S. Ramos ◽  
R.M.S. Martins ◽  
F.M. Braz Fernandes ◽  
M.T. Vieira
Keyword(s):  
Thin Films ◽  
Phase Transformation ◽  
Heating Rate ◽  
Multilayer Thin Films
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