scholarly journals Piezoresistive cantilevers utilized for scanning tunneling and scanning force microscope in ultrahigh vacuum

1994 ◽  
Vol 65 (6) ◽  
pp. 1923-1929 ◽  
Author(s):  
F. J. Giessibl ◽  
B. M. Trafas
1998 ◽  
Vol 69 (1) ◽  
pp. 221-225 ◽  
Author(s):  
W. Allers ◽  
A. Schwarz ◽  
U. D. Schwarz ◽  
R. Wiesendanger

2002 ◽  
Vol 73 (10) ◽  
pp. 3508-3514 ◽  
Author(s):  
M. Liebmann ◽  
A. Schwarz ◽  
S. M. Langkat ◽  
R. Wiesendanger

2008 ◽  
Vol 79 (8) ◽  
pp. 083701 ◽  
Author(s):  
S. Torbrügge ◽  
J. Lübbe ◽  
L. Tröger ◽  
M. Cranney ◽  
T. Eguchi ◽  
...  

Author(s):  
Chang Shen ◽  
Phil Fraundorf ◽  
Robert W. Harrick

Monolithic integration of optoelectronic integrated circuits (OEIC) requires high quantity etched laser facets which prevent the developing of more-highly-integrated OEIC's. The causes of facet roughness are not well understood, and improvement of facet quality is hampered by the difficulty in measuring the surface roughness. There are several approaches to examining facet roughness qualitatively, such as scanning force microscopy (SFM), scanning tunneling microscopy (STM) and scanning electron microscopy (SEM). The challenge here is to allow more straightforward monitoring of deep vertical etched facets, without the need to cleave out test samples. In this presentation, we show air based STM and SFM images of vertical dry-etched laser facets, and discuss the image acquisition and roughness measurement processes. Our technique does not require precision cleaving. We use a traditional tip instead of the T shape tip used elsewhere to preventing “shower curtain” profiling of the sidewall. We tilt the sample about 30 to 50 degrees to avoid the curtain effect.


Author(s):  
P. Fraundorf ◽  
B. Armbruster

Optical interferometry, confocal light microscopy, stereopair scanning electron microscopy, scanning tunneling microscopy, and scanning force microscopy, can produce topographic images of surfaces on size scales reaching from centimeters to Angstroms. Second moment (height variance) statistics of surface topography can be very helpful in quantifying “visually suggested” differences from one surface to the next. The two most common methods for displaying this information are the Fourier power spectrum and its direct space transform, the autocorrelation function or interferogram. Unfortunately, for a surface exhibiting lateral structure over several orders of magnitude in size, both the power spectrum and the autocorrelation function will find most of the information they contain pressed into the plot’s origin. This suggests that we plot power in units of LOG(frequency)≡-LOG(period), but rather than add this logarithmic constraint as another element of abstraction to the analysis of power spectra, we further recommend a shift in paradigm.


2001 ◽  
Vol 7 (S2) ◽  
pp. 920-921
Author(s):  
Yukihito Kondo ◽  
Kimiharu Okamoto ◽  
Mikio Naruse ◽  
Toshikazu Honda ◽  
Mike Kersker

Ultrahigh-vacuum transmission electron microscopy (UHVTEM) has become increasingly popular for the direct observation of nanostructures having clean surfaces, since industrial requirements to make and research nano-scale materials have been rapidly growing for quantum or nanoscale electronic devices. Since we have first developed high resolution UHVTEM in 1986, the UHVTEMs have been evolved with steady advances such as UHV compatible goniometer, field emission gun or etc. Furthermore, the UHVTEM started to combine analytical capabilities such as energy dispersive X-ray spectrometer, in-column type energy filter and etc., and to combine STM (scanning tunneling microscope). The UHV technology is essential for the analysis, because the portion of contaminant in a nano-scale specimen increases as the size of the specimen goes down. This paper reports the results of gold nanostructures by recently the developed UHVTEM.Figure 1 shows recently developed UHVTEM with Schottky type field emission gun.


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