Phase‐modulated ellipsometer using a Fourier transform infrared spectrometer for real time applications
1993 ◽
Vol 64
(8)
◽
pp. 2153-2159
◽
1994 ◽
Vol 12
(4)
◽
pp. 1938-1942
◽
2001 ◽
Vol 40
(Part 1, No. 9A)
◽
pp. 5312-5313
◽
2007 ◽
Vol 78
(2)
◽
pp. 029901
◽
2021 ◽