Metal vapor vacuum arc ion sources (invited)

Ian G. Brown

doi:10.1063/1.1142927

Metal vapor vacuum arc ion sources (invited)

Review of Scientific Instruments ◽

10.1063/1.1142927 ◽

1992 ◽

Vol 63 (4) ◽

pp. 2351-2356 ◽

Cited By ~ 32

Author(s):

Ian G. Brown

Keyword(s):

Metal Vapor ◽

Ion Sources ◽

Vacuum Arc

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Metal vapor vacuum arc ion sources ‘‘Raduga’’

Review of Scientific Instruments ◽

10.1063/1.1144766 ◽

1994 ◽

Vol 65 (10) ◽

pp. 3126-3133 ◽

Cited By ~ 24

Author(s):

A. I. Ryabchikov ◽

S. V. Dektjarev ◽

I. B. Stepanov

Keyword(s):

Metal Vapor ◽

Ion Sources ◽

Vacuum Arc

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Metal Vapor Vacuum Arc Ion Sources For Implantation And Plasma Processing

Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.1994.588705 ◽

2005 ◽

Author(s):

S. Humphries ◽

T.R. Lockner

Keyword(s):

Plasma Processing ◽

Metal Vapor ◽

Ion Sources ◽

Vacuum Arc

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Propagation of metal vapor vacuum arc ions into electron cyclotron resonance ion sources

Review of Scientific Instruments ◽

10.1063/1.1148571 ◽

1998 ◽

Vol 69 (2) ◽

pp. 795-797 ◽

Cited By ~ 4

Author(s):

M. Cavenago ◽

T. Kulevoy ◽

A. Vassiliev

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Metal Vapor ◽

Electron Cyclotron ◽

Ion Sources ◽

Vacuum Arc

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Some novel design features of the LBL metal vapor vacuum arc ion sources

Review of Scientific Instruments ◽

10.1063/1.1141924 ◽

1990 ◽

Vol 61 (1) ◽

pp. 580-582 ◽

Cited By ~ 33

Author(s):

Robert A. MacGill ◽

Ian G. Brown ◽

James E. Galvin

Keyword(s):

Metal Vapor ◽

Ion Sources ◽

Vacuum Arc ◽

Design Features ◽

Novel Design

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Vacuum arc ion sources

Review of Scientific Instruments ◽

10.1063/1.1144756 ◽

1994 ◽

Vol 65 (10) ◽

pp. 3061-3081 ◽

Cited By ~ 388

Author(s):

Ian G. Brown

Keyword(s):

Ion Sources ◽

Vacuum Arc

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Structure and corrosion behavior of (Ti, Fe, C) films co-deposited by three metal vapor vacuum arc beams

Surface and Coatings Technology ◽

10.1016/s0257-8972(00)00625-3 ◽

2000 ◽

Vol 128-129 ◽

pp. 209-212 ◽

Cited By ~ 2

Author(s):

Hong Liang ◽

Furong Ma ◽

Xiaoyan Wang ◽

Tonghe Zhang ◽

Hong Zhu ◽

...

Keyword(s):

Corrosion Behavior ◽

Metal Vapor ◽

Vacuum Arc

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Results from energetic electron beam metal vapor vacuum arc and Z-discharge plasma metal vapor vacuum arc: Development of new sources of intense high charge state heavy-ion beams

Review of Scientific Instruments ◽

10.1063/1.1148738 ◽

1998 ◽

Vol 69 (2) ◽

pp. 798-800 ◽

Cited By ~ 14

Author(s):

A. Hershcovitch ◽

B. M. Johnson ◽

F. Liu ◽

A. Anders ◽

I. G. Brown

Keyword(s):

Electron Beam ◽

Charge State ◽

Discharge Plasma ◽

Energetic Electron ◽

Metal Vapor ◽

Heavy Ion ◽

Ion Beams ◽

High Charge State ◽

Vacuum Arc ◽

High Charge

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Microstructures and properties changes induced by a metal vapor vacuum arc chromium interlayer in chromium nitride films

Materials Letters ◽

10.1016/j.matlet.2004.05.020 ◽

2004 ◽

Vol 58 (22-23) ◽

pp. 2924-2926 ◽

Cited By ~ 12

Author(s):

Hong-Ying Chen ◽

Sheng Han ◽

Han C Shih

Keyword(s):

Metal Vapor ◽

Chromium Nitride ◽

Vacuum Arc

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Vacuum arc ion sources: recent developments and applications

IEEE Transactions on Plasma Science ◽

10.1109/tps.2005.860088 ◽

2005 ◽

Vol 33 (6) ◽

pp. 1931-1943 ◽

Cited By ~ 32

Author(s):

I. Brown ◽

E. Oks

Keyword(s):

Ion Sources ◽

Vacuum Arc ◽

Recent Developments

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Performance of a high‐current metal vapor vacuum arc ion source

Review of Scientific Instruments ◽

10.1063/1.1141552 ◽

1990 ◽

Vol 61 (12) ◽

pp. 3775-3782 ◽

Cited By ~ 14

Author(s):

Hiroshi Shiraishi ◽

Ian G. Brown

Keyword(s):

Metal Vapor ◽

Ion Source ◽

Vacuum Arc ◽

High Current

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