Super‐polished silicon carbide mirror for high‐power operation of excimer lasers in a vacuum ultraviolet spectral range
1990 ◽
Vol 61
(2)
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pp. 728-731
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1985 ◽
Vol 147
(11)
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pp. 587
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Keyword(s):
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1994 ◽
Vol 41
(8)
◽
pp. 1310-1318
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