Compact storage rings Siberia‐AS and Siberia‐SM synchrotron radiation sources for lithography

1989 ◽  
Vol 60 (7) ◽  
pp. 1767-1770 ◽  
Author(s):  
V. V. Anashin ◽  
V. S. Arbuzov ◽  
G. A. Blinov ◽  
V. G. Veshcherevich ◽  
P. D. Vobly ◽  
...  
2014 ◽  
Vol 21 (5) ◽  
pp. 1006-1010 ◽  
Author(s):  
Peter Denes ◽  
Bernd Schmitt

Dramatic advances in synchrotron radiation sources produce ever-brighter beams of X-rays, but those advances can only be used if there is a corresponding improvement in X-ray detectors. With the advent of storage ring sources capable of being diffraction-limited (down to a certain wavelength), advances in detector speed, dynamic range and functionality is required. While many of these improvements in detector capabilities are being pursued now, the orders-of-magnitude increases in brightness of diffraction-limited storage ring sources will require challenging non-incremental advances in detectors. This article summarizes the current state of the art, developments underway worldwide, and challenges that diffraction-limited storage ring sources present for detectors.


1990 ◽  
Author(s):  
A. G. Mathewson ◽  
M. Andritschky ◽  
A. Grillot ◽  
O. Gröbner ◽  
P. Strubin ◽  
...  

1981 ◽  
Vol 52 (4) ◽  
pp. 509-516 ◽  
Author(s):  
J. A. Golovchenko ◽  
R. A. Levesque ◽  
P. L. Cowan

Author(s):  
Andrea Martini ◽  
Alexander A. Guda ◽  
Sergey A. Guda ◽  
Aram L. Bugaev ◽  
Olga V. Safonova ◽  
...  

Modern synchrotron radiation sources and free electron laser made X-ray absorption spectroscopy (XAS) an analytical tool for the structural analysis of materials under in situ or operando conditions. Fourier approach...


Sign in / Sign up

Export Citation Format

Share Document