Comparison of surface roughness of polished silicon wafers measured by light scattering topography, soft‐x‐ray scattering, and atomic‐force microscopy

1995 ◽  
Vol 66 (18) ◽  
pp. 2346-2348 ◽  
Author(s):  
C. Teichert ◽  
J. F. MacKay ◽  
D. E. Savage ◽  
M. G. Lagally ◽  
M. Brohl ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Atomic Force Microscopy ◽  
Light Scattering ◽  
Silicon Wafers ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Ray Scattering

The surface roughness investigation by the atomic force microscopy, x-ray scattering, and light scattering

2006 ◽  
Author(s):  
M. L. Zanaveskin ◽  
Yu. V. Grishchenko ◽  
A. L. Tolstikhina ◽  
V. E. Asadchikov ◽  
B. S. Roshchin ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Atomic Force Microscopy ◽  
Light Scattering ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Ray Scattering

Comparative study of the roughness of optical surfaces and thin films by use of x-ray scattering and atomic force microscopy

1999 ◽  
Vol 38 (4) ◽  
pp. 684 ◽  
Author(s):  
Victor E. Asadchikov ◽  
Angela Duparré ◽  
Stefan Jakobs ◽  
Albert Yu. Karabekov ◽  
Igor V. Kozhevnikov ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Force Microscopy ◽  
Comparative Study ◽  
X Ray ◽  
Force Microscopy ◽  
Optical Surfaces ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Ray Scattering

Microstructure Determination of AOT + Phenol Organogels Utilizing Small-Angle X-ray Scattering and Atomic Force Microscopy

2001 ◽  
Vol 123 (10) ◽  
pp. 2414-2421 ◽  
Author(s):  
Blake A. Simmons ◽  
Chad E. Taylor ◽  
Forrest A. Landis ◽  
Vijay T. John ◽  
Gary L. McPherson ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Small Angle ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Ray Scattering

Nanometer surface gratings on Si(100) characterized by x-ray scattering under grazing incidence and atomic force microscopy

1997 ◽  
Vol 81 (3) ◽  
pp. 1212-1216 ◽  
Author(s):  
T. H. Metzger ◽  
K. Haj-Yahya ◽  
J. Peisl ◽  
M. Wendel ◽  
H. Lorenz ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Grazing Incidence ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Ray Scattering
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