Deceleration ion optical system for sputtering measurements between 50 and 500 eV as function of angle of incidence
1987 ◽
Vol 58
(10)
◽
pp. 1830-1832
◽
Keyword(s):
2015 ◽
Vol 22
(4)
◽
pp. 930-935
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Keyword(s):
1994 ◽
Vol 35
(3)
◽
pp. 325-335
Keyword(s):