Extended x‐ray absorption fine structure analysis of the difference in local structure of tantalum oxide capacitor films produced by various annealing methods

1995 ◽  
Vol 66 (17) ◽  
pp. 2209-2211 ◽  
Author(s):  
Hidekazu Kimura ◽  
Jun’ichiro Mizuki ◽  
Satoshi Kamiyama ◽  
Hiroshi Suzuki
2002 ◽  
Vol 74 (3-4) ◽  
pp. 225-234 ◽  
Author(s):  
Yasutaka Nagai ◽  
Takashi Yamamoto ◽  
Tsunehiro Tanaka ◽  
Satohiro Yoshida ◽  
Takamasa Nonaka ◽  
...  

1998 ◽  
Vol 83 (10) ◽  
pp. 5065-5068 ◽  
Author(s):  
M. Braglia ◽  
G. Dai ◽  
S. Mosso ◽  
S. Pascarelli ◽  
F. Boscherini ◽  
...  

1986 ◽  
Vol 35 (8) ◽  
pp. 785-788 ◽  
Author(s):  
Nobuaki OGAWA ◽  
Hideto SAKANE ◽  
Takashi MIYANAGA ◽  
Nobuyuki MATSUBAYASHI ◽  
Shigero IKEDA

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