Selective epitaxial growth of GaInP by low‐pressure metal‐organic chemical‐vapor deposition using ethyldimethylindium as In source

1994 ◽  
Vol 65 (17) ◽  
pp. 2217-2219 ◽  
Author(s):  
Shih‐Hsiung Chan ◽  
Simon Ming Sze ◽  
Chun‐Yen Chang ◽  
Wei‐I Lee
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Organic Chemical ◽  
Selective Epitaxial Growth ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Selective epitaxial growth of Ge 1−x Sn x on Si by using metal-organic chemical vapor deposition

2017 ◽  
Vol 468 ◽  
pp. 614-619 ◽  
Author(s):  
Tomoya Washizu ◽  
Shinichi Ike ◽  
Yuki Inuzuka ◽  
Wakana Takeuchi ◽  
Osamu Nakatsuka ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Selective Epitaxial Growth ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Epitaxial Growth and Polarity of ZnO Films on Sapphire (0001) Substrates by Low-Pressure Metal Organic Chemical Vapor Deposition

2003 ◽  
Vol 42 (Part 1, No. 4B) ◽  
pp. 2291-2295 ◽  
Author(s):  
Bao-Ping Zhang ◽  
Le-Hong Manh ◽  
Katsuki Wakatsuki ◽  
Tsuyoshi Ohnishi ◽  
Mikk Lippmaa ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Organic Chemical ◽  
Zno Films ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
Sign in / Sign up

Export Citation Format

Share Document