Maskless patterning of silicon surface based on scanning tunneling microscope tip‐induced anodization and chemical etching

1994 ◽  
Vol 65 (12) ◽  
pp. 1569-1571 ◽  
Author(s):  
Hiroyuki Sugimura ◽  
Takuma Yamamoto ◽  
Nobuyuki Nakagiri ◽  
Masayuki Miyashita ◽  
Tetsuji Onuki
Nano Research ◽  
2020 ◽  
Vol 13 (1) ◽  
pp. 145-150 ◽  
Author(s):  
Dogan Kaya ◽  
Richard J. Cobley ◽  
Richard E. Palmer

AbstractUnderstanding the atomistic formation of oxide layers on semiconductors is important for thin film fabrication, scaling down conventional devices and for the integration of emerging research materials. Here, the initial oxidation of Si(111) is studied using the scanning tunneling microscope. Prior to the complete saturation of the silicon surface with oxygen, we are able to probe the atomic nature of the oxide layer formation. We establish the threshold for local manipulation of inserted oxygen sites to be +3.8 V. Only by combining imaging with local atomic manipulation are we able to determine whether inserted oxygen exists beneath surface-bonded oxygen sites and differentiate between sites that have one and more than one oxygen atom inserted beneath the surface. Prior to the creation of the thin oxide film we observe a flip in the manipulation rates of inserted oxygen sites consistent with more oxygen inserting beneath the silicon surface.


Author(s):  
Rebecca W. Keller ◽  
Carlos Bustamante ◽  
David Bear

Under ideal conditions, the Scanning Tunneling Microscope (STM) can create atomic resolution images of different kinds of samples. The STM can also be operated in a variety of non-vacuum environments. Because of its potentially high resolution and flexibility of operation, it is now being applied to image biological systems. Several groups have communicated the imaging of double and single stranded DNA.However, reproducibility is still the main problem with most STM results on biological samples. One source of irreproducibility is unreliable sample preparation techniques. Traditional deposition methods used in electron microscopy, such as glow discharge and spreading techniques, do not appear to work with STM. It seems that these techniques do not fix the biological sample strongly enough to the substrate surface. There is now evidence that there are strong forces between the STM tip and the sample and, unless the sample is strongly bound to the surface, it can be swept aside by the tip.


Author(s):  
J. T. Woodward ◽  
J. A. N. Zasadzinski

The Scanning Tunneling Microscope (STM) offers exciting new ways of imaging surfaces of biological or organic materials with resolution to the sub-molecular scale. Rigid, conductive surfaces can readily be imaged with the STM with atomic resolution. Unfortunately, organic surfaces are neither sufficiently conductive or rigid enough to be examined directly with the STM. At present, nonconductive surfaces can be examined in two ways: 1) Using the AFM, which measures the deflection of a weak spring as it is dragged across the surface, or 2) coating or replicating non-conductive surfaces with metal layers so as to make them conductive, then imaging with the STM. However, we have found that the conventional freeze-fracture technique, while extremely useful for imaging bulk organic materials with STM, must be modified considerably for optimal use in the STM.


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