Study of reactive ion etching‐induced damage in GaAs/AlGaAs structures using a quantum well intermixing probe

1994 ◽  
Vol 64 (5) ◽  
pp. 598-600 ◽  
Author(s):  
B. S. Ooi ◽  
A. C. Bryce ◽  
C. D. W. Wilkinson ◽  
J. H. Marsh
Keyword(s):  
Quantum Well ◽  
Reactive Ion Etching ◽  
Quantum Well Intermixing ◽  
Ion Etching

scholarly journals Study and application of reactive ion etching on GaInP/InGaAs/GaInP quantum-well HEMTs

1998 ◽  
Vol 42 (11) ◽  
pp. 1933-1937 ◽  
Author(s):  
C.W Kuo ◽  
Y.K Su ◽  
H.H Lin ◽  
C.Y Tsia
Keyword(s):  
Quantum Well ◽  
Reactive Ion Etching ◽  
Ion Etching

Photoluminescence of quantum well structures fabricated by reactive ion etching

1996 ◽  
Vol 159 (1-4) ◽  
pp. 451-454 ◽  
Author(s):  
H. Straub ◽  
G. Brunthaler ◽  
W. Faschinger ◽  
G. Bauer ◽  
C. Vieu
Keyword(s):  
Quantum Well ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Quantum Well Structures

Study of quantum well wires of different widths produced by reactive ion etching and anodic oxidation

1996 ◽  
Vol 11 (5) ◽  
pp. 801-804 ◽  
Author(s):  
F N Timofeev ◽  
V B Smirnitskii ◽  
S A Gurevich ◽  
E M Tanklevskaya ◽  
V I Scopina ◽  
...  
Keyword(s):  
Quantum Well ◽  
Anodic Oxidation ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Quantum Well Wires
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