Effect of hydrogen on surface roughening during Si homoepitaxial growth
2007 ◽
Vol 16
(4-7)
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pp. 767-770
◽
2004 ◽
pp. 286-295
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Keyword(s):
1987 ◽
Vol 48
(6)
◽
pp. 1017-1028
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Keyword(s):
2006 ◽
Vol 244
(1)
◽
pp. 81-85
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Keyword(s):
2015 ◽
Vol 54
(4S)
◽
pp. 04DP04
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