X‐ray photoelectron spectroscopy and cross‐sectional transmission electron microscopy studies of titanium nitride/titanium/silicon structures after thermal annealing
2016 ◽
Vol 120
(34)
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pp. 19204-19211
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2019 ◽
Vol 10
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pp. 62-70
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2019 ◽
Vol 79
(7)
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pp. 1276-1286
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1991 ◽
Vol 19
(4)
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pp. 473-485
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