Transmission electron microscopy investigation of the recrystallization of an amorphous layer in Si+‐implanted silicon
2002 ◽
Vol 82
(9)
◽
pp. 1741-1768
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2001 ◽
Vol 11
(1)
◽
pp. 3473-3476
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1977 ◽
Vol 12
(9)
◽
pp. 1862-1868
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