Cross‐section transmission electron microscopy study of carbon‐implanted layers in silicon
1989 ◽
Vol 7
(4)
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pp. 2678-2680
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2002 ◽
Vol 82
(4)
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pp. 735-749
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1996 ◽
Vol 74
(2)
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pp. 57-66
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1994 ◽
Vol 70
(5)
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pp. 1077-1094
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