scholarly journals Effect of microbeam geometry on the nano-mass sensor performance

2019 ◽  
Vol 20 (3) ◽  
pp. 304
Author(s):  
Jahanbakhsh Reisi Ardali ◽  
Reza Ghaderi ◽  
Farhad Raeiszadeh
Keyword(s):  
Microelectromechanical Systems ◽  
Dynamic Mode ◽  
Mass Sensor ◽  
Sensors And Actuators ◽  
Mass Sensors ◽  
Sensor Performance ◽  
Aspect Ratios ◽  
Wide Range ◽  
Important Challenge ◽  
Frequency Variations

Microbeams have a wide range of applications as sensors and actuators in nanotechnology, biotechnology, microelectromechanical systems, and optics. Given their micrometer dimensions, these beams make precision mass sensors of sub-nanogram accuracy. An important challenge regarding mass sensors is to enhance their sensitivity and accuracy. Considering the fact that, this type of sensor operates based on the resonance frequency variations caused by nanoparticle absorption in the dynamic mode, the geometry of the microbeam is considered an important parameter affecting their sensitivity. This paper studies the rectangular microbeam, which is one of the most commonly used types of mass sensors. Three main models were selected by applying inner and outer cuts on the microbeam, and vibrating simulation was carried out using ABAQUS software for a total of 36 mass sensor configurations with different aspect ratios. Simulation results in two selected rectangular microbeam models with outer cuts show the sensitivity of the microsensor increases with increased microbeam rigidity. The triangular hollow microbeam was found to be the best design among the four models selected to be used as mass sensors.

scholarly journals Characterization of SOI MEMS Sidewall Roughness

2011 ◽  
Author(s):  
Leslie M. Phinney ◽  
Bonnie B. McKenzie ◽  
James A. Ohlhausen ◽  
Thomas E. Buchheit ◽  
Randy J. Shul
Keyword(s):  
Aspect Ratio ◽  
Microelectromechanical Systems ◽  
Device Layer ◽  
Sensors And Actuators ◽  
Sidewall Roughness ◽  
Deep Reactive Ion Etching ◽  
Aspect Ratios ◽  
Atomic Force ◽  
Silicon Structures ◽  
Trench Width

Deep reactive ion etching (DRIE) of silicon enables high aspect ratio, deep silicon features that can be incorporated into the fabrication of microelectromechanical systems (MEMS) sensors and actuators. The DRIE process creates silicon structures and consists of three steps: conformal polymer deposition, ion sputtering, and chemical etching. The sequential three step process results in sidewalls with roughness that varies with processing conditions. This paper reports the sidewall roughness for DRIE etched MEMS as a function of trench width from 5 μm to 500 μm for a 125 μm thick device layer corresponding to aspect ratios from 25 to 0.25. Using a scanning electron microscope (SEM), the surfaces were imaged detecting an upper region exhibiting a scalloping morphology and a rougher lower region exhibiting a curtaining morphology. The height of rougher curtaining region increases linearly with aspect ratio when the etch cleared the entire device layer. The surface roughness for two trench widths: 15 μm and 100 μm were further characterized using an atomic force microscope (AFM), and RMS roughness values are reported as a function of height along the surface. The sidewall roughness varies with height and depends on the trench width.

scholarly journals A Low Cost Inkjet-Printed Mass Sensor Using a Frequency Readout Strategy

Sensors ◽  
2021 ◽  
Vol 21 (14) ◽  
pp. 4878
Author(s):  
Bruno Andò ◽  
Salvatore Baglio ◽  
Vincenzo Marletta ◽  
Ruben Crispino
Keyword(s):  
Cantilever Beam ◽  
Low Cost ◽  
Strain Sensor ◽  
Mass Sensor ◽  
Mass Sensors ◽  
Target Mass ◽  
Wide Range ◽  
Planar Coil ◽  
Potential Applications ◽  
Actuation Mode

The development of low-cost mass sensors is of unique interest for the scientific community due to the wide range of fields requiring these kind of devices. In this paper, a full inkjet-printed mass sensor is proposed. The device is based on a PolyEthylene Terephthalate (PET) cantilever beam (operating in its first natural frequency) where a strain-sensor and a planar coil have been realized by a low-cost InkJet Printing technology to implement the sensing and actuation strategies, respectively. The frequency readout strategy of the sensor presents several advantages, such as the intrinsic robustness against instabilities of the strain sensor, the residual stress of the cantilever beam, the target mass material, and the distance between the permanent magnet and the actuation coil (which changes as a function of the target mass values). However, the frictionless actuation mode represents another shortcoming of the sensor. The paper describes the sensor design, realization, and characterization while investigating its expected behavior by exploiting dedicate models. The working span of the device is 0–0.36 g while its resolution is in the order of 0.001 g, thus addressing a wide range of potential applications requiring very accurate mass measurements within a narrow operating range.

scholarly journals Strength Analysis of Alternative Airframe Layouts of Regional Aircraft on the Basis of Automated Parametrical Models

Aerospace ◽  
2021 ◽  
Vol 8 (3) ◽  
pp. 80
Author(s):  
Dmitry V. Vedernikov ◽  
Alexander N. Shanygin ◽  
Yury S. Mirgorodsky ◽  
Mikhail D. Levchenkov
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
High Performance ◽  
Strength Analysis ◽  
Labor Input ◽  
Aerodynamic Loading ◽  
Aspect Ratios ◽  
Wide Range ◽  
Parametrical Design

This publication presents the results of complex parametrical strength investigations of typical wings for regional aircrafts obtained by means of the new version of the four-level algorithm (FLA) with the modified module responsible for the analysis of aerodynamic loading. This version of FLA, as well as a base one, is focused on significant decreasing time and labor input of a complex strength analysis of airframes by using simultaneously different principles of decomposition. The base version includes four-level decomposition of airframe and decomposition of strength tasks. The new one realizes additional decomposition of alternative variants of load cases during the process of determination of critical load cases. Such an algorithm is very suitable for strength analysis and designing airframes of regional aircrafts having a wide range of aerodynamic concepts. Results of validation of the new version of FLA for a high-aspect-ratio wing obtained in this work confirmed high performance of the algorithm in decreasing time and labor input of strength analysis of airframes at the preliminary stages of designing. During parametrical design investigation, some interesting results for strut-braced wings having high aspect ratios were obtained.

scholarly journals Click Chemistry Enabling Covalent and Non-Covalent Modifications of Graphene with (Poly)saccharides

Polymers ◽  
2020 ◽  
Vol 13 (1) ◽  
pp. 142
Author(s):  
Hu Li ◽  
Raffaello Papadakis
Keyword(s):  
Click Chemistry ◽  
Life Science ◽  
Environmental Applications ◽  
Energy Materials ◽  
Sensors And Actuators ◽  
Polar Solvents ◽  
Wide Range ◽  
Potential Applications ◽  
Covalent Modifications

Graphene is a material with outstanding properties and numerous potential applications in a wide range of research and technology areas, spanning from electronics, energy materials, sensors, and actuators to life-science and many more. However, the insolubility and poor dispersibility of graphene are two major problems hampering its use in certain applications. Tethering mono-, di-, or even poly-saccharides on graphene through click-chemistry is gaining more and more attention as a key modification approach leading to new graphene-based materials (GBM) with improved hydrophilicity and substantial dispersibility in polar solvents, e.g., water. The attachment of (poly)saccharides on graphene further renders the final GBMs biocompatible and could open new routes to novel biomedical and environmental applications. In this review, recent modifications of graphene and other carbon rich materials (CRMs) through click chemistry are reviewed.

scholarly journals Influence of Pile Diameter and Aspect Ratio on the Lateral Response of Monopiles in Sand with Different Relative Densties

2021 ◽  
Vol 9 (6) ◽  
pp. 618
Author(s):  
Huan Wang ◽  
Lizhong Wang ◽  
Yi Hong ◽  
Amin Askarinejad ◽  
Ben He ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Large Diameter ◽  
Pressure Coefficient ◽  
Offshore Wind ◽  
Fe Model ◽  
Soil Pressure ◽  
Pile Diameter ◽  
Centrifuge Tests ◽  
Aspect Ratios ◽  
Wide Range

The large-diameter monopiles are the most preferred foundation used in offshore wind farms. However, the influence of pile diameter and aspect ratio on the lateral bearing behavior of monopiles in sand with different relative densities has not been systematically studied. This study presents a series of well-calibrated finite-element (FE) analyses using an advanced state dependent constitutive model. The FE model was first validated against the centrifuge tests on the large-diameter monopiles. Parametric studies were performed on rigid piles with different diameters (D = 4–10 m) and aspect ratios (L/D = 3–7.5) under a wide range of loading heights (e = 5–100 m) in sands with different relative densities (Dr = 40%, 65%, 80%). The API and PISA p-y models were systematically compared and evaluated against the FE simulation results. The numerical results revealed a rigid rotation failure mechanism of the rigid pile, which is independent of pile diameter and aspect ratio. The computed soil pressure coefficient (K = p/Dσ′v) of different diameter piles at same rotation is a function of z/L (z is depth) rather than z/D. The force–moment diagrams at different deflections were quantified in sands of different relative density. Based on the observed pile–soil interaction mechanism, a simple design model was proposed to calculate the combined capacity of rigid piles.

Unravelling the large-scale circulation modes in turbulent Rayleigh–Bénard convection

2021 ◽  
Author(s):  
Susanne Horn ◽  
Peter J. Schmid ◽  
Jonathan M. Aurnou
Keyword(s):  
Large Scale ◽  
Three Dimensional ◽  
Dynamic Mode Decomposition ◽  
Dynamic Mode ◽  
Mean Flow ◽  
Large Scale Circulation ◽  
Convective Systems ◽  
Aspect Ratios ◽  
Mode Decomposition ◽  
Coherent Flow Structure

Abstract The large-scale circulation (LSC) is the most fundamental turbulent coherent flow structure in Rayleigh-B\'enard convection. Further, LSCs provide the foundation upon which superstructures, the largest observable features in convective systems, are formed. In confined cylindrical geometries with diameter-to-height aspect ratios of Γ ≅ 1, LSC dynamics are known to be governed by a quasi-two-dimensional, coupled horizontal sloshing and torsional (ST) oscillatory mode. In contrast, in Γ ≥ √2 cylinders, a three-dimensional jump rope vortex (JRV) motion dominates the LSC dynamics. Here, we use dynamic mode decomposition (DMD) on direct numerical simulation data of liquid metal to show that both types of modes co-exist in Γ = 1 and Γ = 2 cylinders but with opposite dynamical importance. Furthermore, with this analysis, we demonstrate that ST oscillations originate from a tilted elliptical mean flow superposed with a symmetric higher order mode, which is connected to the four rolls in the plane perpendicular to the LSC in Γ = 1 tanks.

scholarly journals Multiellipsoidal Mapping Algorithm

2018 ◽  
Vol 8 (8) ◽  
pp. 1239 ◽  
Author(s):  
Carlos Villaseñor ◽  
Nancy Arana-Daniel ◽  
Alma Alanis ◽  
Carlos Lopez-Franco ◽  
Javier Gomez-Avila
Keyword(s):  
Point Clouds ◽  
Mapping Algorithm ◽  
Robotic Mapping ◽  
Wide Range ◽  
Important Challenge ◽  
Memory Cost ◽  
Environmental Representation ◽  
Object Shapes ◽  
Quadratic Surfaces ◽  
Object Mapping

The robotic mapping problem, which consists in providing a spatial model of the environment to a robot, is a research topic with a wide range of applications. One important challenge of this problem is to obtain a map that is information-rich (i.e., a map that preserves main structures of the environment and object shapes) yet still has a low memory cost. Point clouds offer a highly descriptive and information-rich environmental representation; accordingly, many algorithms have been developed to approximate point clouds and lower the memory cost. In recent years, approaches using basic and “simple” (i.e., using only planes or spheres) geometric entities for approximating point clouds have been shown to provide accurate representations at low memory cost. However, a better approximation can be implemented if more complex geometric entities are used. In the present paper, a new object-mapping algorithm is introduced for approximating point clouds with multiple ellipsoids and other quadratic surfaces. We show that this algorithm creates maps that are rich in information yet low in memory cost and have features suitable for other robotics problems such as navigation and pose estimation.

scholarly journals Measurement and Isolation of Thermal Stress in Silicon-On-Glass MEMS Structures

Sensors ◽  
2018 ◽  
Vol 18 (8) ◽  
pp. 2603 ◽  
Author(s):  
Zhiyong Chen ◽  
Meifeng Guo ◽  
Rong Zhang ◽  
Bin Zhou ◽  
Qi Wei
Keyword(s):  
Thermal Stress ◽  
Natural Frequency ◽  
Frequency Conversion ◽  
Thermal Stresses ◽  
Sensors And Actuators ◽  
Stress Variation ◽  
Rigid Frame ◽  
Measured Stress ◽  
Stress Isolation ◽  
Frequency Variations

The mechanical stress in silicon-on-glass MEMS structures and a stress isolation scheme were studied by analysis and experimentation. Double-ended tuning forks (DETFs) were used to measure the stress based on the stress-frequency conversion effect. Considering the coefficients of thermal expansion (CTEs) of silicon and glass and the temperature coefficient of the Young’s modulus of silicon, the sensitivity of the natural frequency to temperature change was analyzed. A stress isolation mechanism composed of annular isolators and a rigid frame is proposed to prevent the structure inside the frame from being subjected to thermal stresses. DETFs without and with one- or two-stage isolation frames with the orientations <110> and <100> were designed, the stress and natural frequency variations with temperature were simulated and measured. The experimental results show that in the temperature range of −50 °C to 85 °C, the stress varied from −18 MPa to 10 MPa in the orientation <110> and −11 MPa to 5 MPa in the orientation <100>. For the 1-stage isolated DETF of <110> orientation, the measured stress variation was only 0.082 MPa. The thermal stress can be mostly rejected by a stress isolation structure, which is applicable in the design of stress-sensitive MEMS sensors and actuators.

scholarly journals Two-Side Laser Processing Method for Producing High Aspect Ratio Microholes

2017 ◽  
Vol 5 (4) ◽  
Author(s):  
Vahid Nasrollahi ◽  
Pavel Penchev ◽  
Stefan Dimov ◽  
Lars Korner ◽  
Richard Leach ◽  
...  
Keyword(s):  
Cross Sections ◽  
Laser Processing ◽  
Industrial Applications ◽  
Laser Drilling ◽  
Special Focus ◽  
Geometrical Accuracy ◽  
Aspect Ratios ◽  
Wide Range ◽  
High Flexibility ◽  
Accuracy And Repeatability

Laser microprocessing is a very attractive option for a growing number of industrial applications due to its intrinsic characteristics, such as high flexibility and process control and also capabilities for noncontact processing of a wide range of materials. However, there are some constrains that limit the applications of this technology, i.e., taper angles on sidewalls, edge quality, geometrical accuracy, and achievable aspect ratios of produced structures. To address these process limitations, a new method for two-side laser processing is proposed in this research. The method is described with a special focus on key enabling technologies for achieving high accuracy and repeatability in two-side laser drilling. The pilot implementation of the proposed processing configuration and technologies is discussed together with an in situ, on-machine inspection procedure to verify the achievable positional and geometrical accuracy. It is demonstrated that alignment accuracy better than 10 μm is achievable using this pilot two-side laser processing platform. In addition, the morphology of holes with circular and square cross sections produced with one-side laser drilling and the proposed method was compared in regard to achievable aspect ratios and holes' dimensional and geometrical accuracy and thus to make conclusions about its capabilities.

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