scholarly journals Optimal PID control of a nano-Newton CMOS-MEMS capacitive force sensor for biomedical applications

2014 ◽  
Vol 15 (2) ◽  
pp. 139-145 ◽  
Author(s):  
Reza Jalil Mozhdehi ◽  
Ali Selk Ghafari
2013 ◽  
Vol 647 ◽  
pp. 315-320 ◽  
Author(s):  
Pradeep Kumar Rathore ◽  
Brishbhan Singh Panwar

This paper reports on the design and optimization of current mirror MOSFET embedded pressure sensor. A current mirror circuit with an output current of 1 mA integrated with a pressure sensing n-channel MOSFET has been designed using standard 5 µm CMOS technology. The channel region of the pressure sensing MOSFET forms the flexible diaphragm as well as the strain sensing element. The piezoresistive effect in MOSFET has been exploited for the calculation of strain induced carrier mobility variation. The output transistor of the current mirror forms the active pressure sensing MOSFET which produces a change in its drain current as a result of altered channel mobility under externally applied pressure. COMSOL Multiphysics is utilized for the simulation of pressure sensing structure and Tspice is employed to evaluate the characteristics of the current mirror pressure sensing circuit. Simulation results show that the pressure sensor has a sensitivity of 10.01 mV/MPa. The sensing structure has been optimized through simulation for enhancing the sensor sensitivity to 276.65 mV/MPa. These CMOS-MEMS based pressure sensors integrated with signal processing circuitry on the same chip can be used for healthcare and biomedical applications.


2011 ◽  
Vol 2-3 ◽  
pp. 489-494
Author(s):  
Zhi Yong Sun ◽  
Wen Lin Chen ◽  
Yun Quan Su ◽  
Li Na Hao

This article is intended to design a static micro-force sensor with a simple structure employing the polymer material PVDF (polyvinylidene fluoride) film as its sensing element, and will carry out some micro-force tracking tests. During the tracking tests, this paper employs a Fuzzy-PID control method and an ordinary PD control method to control the system, and will also analyze the results of them.


2015 ◽  
Vol 6 (5) ◽  
pp. 193
Author(s):  
Haiquan Wang ◽  
Yingyue Hu ◽  
Wudai Liao ◽  
Tongbin Yan

Sign in / Sign up

Export Citation Format

Share Document