Modelling of the Deposition of Molybdenum on Silicon from Molybdenum Hexafluoride and Hydrogen

E. N. Orij; M. H.J.M. de Croon; G. B. Marin

doi:10.1051/jphyscol:1995539

Modelling of the Deposition of Molybdenum on Silicon from Molybdenum Hexafluoride and Hydrogen

Journal de Physique IV (Proceedings) ◽

10.1051/jphyscol:1995539 ◽

1995 ◽

Vol 05 (C5) ◽

pp. C5-331-C5-338 ◽

Cited By ~ 1

Author(s):

E. N. Orij ◽

M. H.J.M. de Croon ◽

G. B. Marin

Keyword(s):

Molybdenum Hexafluoride

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Chemical reactions of molybdenum hexafluoride

Journal of Inorganic and Nuclear Chemistry ◽

10.1016/0022-1902(62)80185-7 ◽

1962 ◽

Vol 24 (3) ◽

pp. 309-314 ◽

Cited By ~ 15

Author(s):

T.A. O'Donnell ◽

D.F. Stewart

Keyword(s):

Chemical Reactions ◽

Molybdenum Hexafluoride

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Infrared spectra of uranium hexafluoride, tungsten hexafluoride, molybdenum hexafluoride, and sulfur hexafluoride complexes with hydrogen fluoride in solid argon

The Journal of Physical Chemistry ◽

10.1021/j100156a028 ◽

1991 ◽

Vol 95 (3) ◽

pp. 1183-1188 ◽

Cited By ~ 5

Author(s):

Rodney D. Hunt ◽

Lester Andrews ◽

L. M. Toth

Keyword(s):

Hydrogen Fluoride ◽

Infrared Spectra ◽

Sulfur Hexafluoride ◽

Uranium Hexafluoride ◽

Tungsten Hexafluoride ◽

Molybdenum Hexafluoride ◽

Solid Argon

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Ultra-slow reorientational motions in solid molybdenum hexafluoride

Chemical Physics Letters ◽

10.1016/0009-2614(70)85026-6 ◽

1970 ◽

Vol 4 (8) ◽

pp. 501-504 ◽

Cited By ~ 10

Author(s):

J. Virlet ◽

P. Rigny

Keyword(s):

Molybdenum Hexafluoride

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Reactions of molybdenum hexafluoride with compounds containing methoxo groups

Journal of Fluorine Chemistry ◽

10.1016/s0022-1139(00)83237-6 ◽

1972 ◽

Vol 1 (3) ◽

pp. 376-378 ◽

Cited By ~ 11

Author(s):

D.W. Walker ◽

J.M. Winfield

Keyword(s):

Molybdenum Hexafluoride

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Matrix infrared spectra of hydrogen chloride complexes with uranium hexafluoride, tungsten hexafluoride and molybdenum hexafluoride

Inorganic Chemistry ◽

10.1021/ic00020a011 ◽

1991 ◽

Vol 30 (20) ◽

pp. 3829-3832 ◽

Cited By ~ 3

Author(s):

Rodney D. Hunt ◽

Lester. Andrews ◽

L. Mac Toth

Keyword(s):

Hydrogen Chloride ◽

Infrared Spectra ◽

Uranium Hexafluoride ◽

Chloride Complexes ◽

Tungsten Hexafluoride ◽

Molybdenum Hexafluoride

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Vibrational spectrum and force field of molybdenum hexafluoride

The Journal of Chemical Physics ◽

10.1063/1.430320 ◽

1975 ◽

Vol 62 (10) ◽

pp. 3974-3978 ◽

Cited By ~ 29

Author(s):

Robin S. McDowell ◽

Ruth J. Sherman ◽

Larned B. Asprey ◽

R. Craig Kennedy

Keyword(s):

Vibrational Spectrum ◽

Force Field ◽

Molybdenum Hexafluoride

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The reaction of molybdenum hexafluoride with carboxylic acids

Journal of Fluorine Chemistry ◽

10.1016/s0022-1139(00)82086-2 ◽

1979 ◽

Vol 13 (4) ◽

pp. 375-378 ◽

Cited By ~ 9

Author(s):

Michael Van Der Puy

Keyword(s):

Carboxylic Acids ◽

Molybdenum Hexafluoride

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The structures of fluorides. IX. The orthorhombic form of molybdenum hexafluoride

Acta Crystallographica Section B ◽

10.1107/s0567740875002890 ◽

1975 ◽

Vol 31 (2) ◽

pp. 398-401 ◽

Cited By ~ 13

Author(s):

J. H. Levy ◽

J. C. Taylor ◽

P. W. Wilson

Keyword(s):

Molybdenum Hexafluoride

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THERMODYNAMIC PROPERTIES OF HIGHER FLUORIDES. II. THE HEATS OF SOLUTION AND OF FORMATION OF MOLYBDENUM HEXAFLUORIDE, TUNGSTEN HEXAFLUORIDE AND NIOBIUM PENTAFLUORIDE1a

The Journal of Physical Chemistry ◽

10.1021/j100834a019 ◽

1960 ◽

Vol 64 (5) ◽

pp. 591-594 ◽

Cited By ~ 14

Author(s):

O. E. Myers ◽

A. P. Brady

Keyword(s):

Thermodynamic Properties ◽

Heats Of Solution ◽

Tungsten Hexafluoride ◽

Molybdenum Hexafluoride

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Molybdenum Hexafluoride

Hawley's Condensed Chemical Dictionary ◽

10.1002/9780470114735.hawley11099 ◽

2007 ◽

Keyword(s):

Molybdenum Hexafluoride

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