Kinetics of LPCVD of gallium nitride and oxynitride films based on pyrolysis of a gallium chloride complex with ammonia GaCl3NH3
2001 ◽
Vol 11
(PR3)
◽
pp. Pr3-141-Pr3-148
2011 ◽
Vol 48
(8)
◽
pp. 595-606
◽
2004 ◽
Vol 35
(6)
◽
pp. 1071-1085
◽
1973 ◽
Vol 69
(0)
◽
pp. 595
◽
Keyword(s):
1969 ◽
Vol 91
(17)
◽
pp. 4854-4859
◽
Keyword(s):