Applications of short wavelength radiation : Soft X-ray microscopy and EUV lithography

2001 ◽  
Vol 11 (PR2) ◽  
pp. Pr2-443-Pr2-449 ◽  
Author(s):  
D. T. Attwood
2009 ◽  
Vol 65 (a1) ◽  
pp. s344-s344
Author(s):  
Joerg Wiesmann ◽  
Joergen Graf ◽  
Bernd Hasse ◽  
Carsten Michaelsen

2001 ◽  
Vol 19 (1) ◽  
pp. 15-22 ◽  
Author(s):  
D. VON DER LINDE ◽  
K. SOKOLOWSKI-TINTEN ◽  
CH. BLOME ◽  
C. DIETRICH ◽  
P. ZHOU ◽  
...  

Relatively small-scale laser-driven sources of short wavelength radiation covering a range from the extreme ultraviolet to the hard X-ray regime are now available. Because the duration of the X-ray pulses is comparable to, or shorter than the laser pulse width, it is possible to carry out X-ray measurements with picosecond or femtosecond time resolution.


2017 ◽  
Vol 837 (2) ◽  
pp. L27 ◽  
Author(s):  
Xin Zhang ◽  
Feng Tian ◽  
Yuwei Wang ◽  
Jimy Dudhia ◽  
Ming Chen

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