Diagnostics on a pulsed surface-wave discharge

1998 ◽  
Vol 08 (PR7) ◽  
pp. Pr7-327-Pr7-335 ◽  
Author(s):  
G. Himmel ◽  
I. Koleva ◽  
H. Schlüter
Keyword(s):  
Surface Wave ◽  
Wave Discharge

High-speed μc-Si films deposition and large-grain poly-Si films deposition by surface wave discharge

2007 ◽  
Vol 515 (12) ◽  
pp. 4983-4987 ◽  
Author(s):  
Y. Hotta ◽  
H. Toyoda ◽  
H. Sugai
Keyword(s):  
Surface Wave ◽  
High Speed ◽  
Si Films ◽  
Wave Discharge

scholarly journals Particle-in-cell simulation on surface-wave discharge process influenced by gas pressure and negative-biased voltage along ion sheath layer

2014 ◽  
Vol 63 (9) ◽  
pp. 095205
Author(s):  
Chen Zhao-Quan ◽  
Yin Zhi-Xiang ◽  
Chen Ming-Gong ◽  
Liu Ming-Hai ◽  
Xu Gong-Lin ◽  
...  
Keyword(s):  
Surface Wave ◽  
Gas Pressure ◽  
Discharge Process ◽  
Particle In Cell ◽  
Cell Simulation ◽  
Wave Discharge

scholarly journals A numerical analysis of a microwave induced coaxial surface wave discharge fed with a mixture of oxygen and hexamethyldisiloxane for the purpose of deposition

2019 ◽  
Vol 28 (11) ◽  
pp. 115003 ◽  
Author(s):  
Efe Kemaneci ◽  
Felix Mitschker ◽  
Jan Benedikt ◽  
Denis Eremin ◽  
Peter Awakowicz ◽  
...  
Keyword(s):  
Surface Wave ◽  
Numerical Analysis ◽  
Wave Discharge

Electron density determination using phase measurement in a pulsed surface wave discharge at high pressure

1994 ◽  
Vol 75 (3) ◽  
pp. 1846-1848 ◽  
Author(s):  
V. Rousseau ◽  
C. Boisse‐Laporte ◽  
Ph. Leprince ◽  
J. Marec
Keyword(s):  
High Pressure ◽  
Surface Wave ◽  
Electron Density ◽  
Phase Measurement ◽  
Density Determination ◽  
Wave Discharge

Characterization of a periodic instability in filamentary surface wave discharge at atmospheric pressure in argon

2012 ◽  
Vol 45 (5) ◽  
pp. 055201 ◽  
Author(s):  
J Hnilica ◽  
V Kudrle ◽  
P Vašina ◽  
J Schäfer ◽  
V Aubrecht
Keyword(s):  
Surface Wave ◽  
Atmospheric Pressure ◽  
Wave Discharge

Collisional radiative model of an argon atmospheric capillary surface-wave discharge

2004 ◽  
Vol 11 (12) ◽  
pp. 5497-5506 ◽  
Author(s):  
A. Yanguas-Gil ◽  
J. Cotrino ◽  
A. R. González-Elipe
Keyword(s):  
Surface Wave ◽  
Capillary Surface ◽  
Collisional Radiative Model ◽  
Radiative Model ◽  
Wave Discharge
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